Coyle, Jason P.; Dey, Gangotri; Sirianni, Eric R.; Kemmell, Marianna L.; Yap, Glenn P. A.; Ritala, Mikko; Leskela, Markku; Elliott, Simon D.; Barry, Sean T.
(American Chemical Society Publications, 2013-03)
Two novel N-heterocyclic carbene (NHC)-containing copper(I) amides are reported as atomic layer deposition (ALD) precursors. 1,3-Diisopropyl-imidazolin-2-ylidene copper hexamethyldisilazide (1) and 4,5-dimethyl-1,3-diiso ...