Sinnis, Vasileios S.; Seto, M.; 't Hooft, G. W.; Watabe, Y.; Morrison, Alan P.; Hoekstra, W.; de Boer, W. B.
(AIP Publishing, 1999)
We report on a silicon-based resonant cavity photodiode with a buried silicon dioxide layer as the bottom reflector. The buried oxide is created by using a separation by implantation of oxygen technique. The device shows ...