Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy
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Date
2007-05-23
Authors
Riza, Nabeel A.
Khan, Sajjad A.
Sheikh, Mumtaz A.
Journal Title
Journal ISSN
Volume Title
Publisher
Society of Photo-Optical Instrumentation Engineers (SPIE)
Published Version
Abstract
An analog liquid crystal lens-based axial scanning confocal microscope is demonstrated as a 48 &mgr;m continuous range optical height measurement sensor used to characterize a 2.3 &mgr;m height Indium Phosphide twin square optical waveguide chip.
Description
Keywords
Instrumentation, measurement, and metrology , Height measurements , Liquid crystals , Confocal microscopy , Scanning microscopy , Sensors , Liquid crystals , Confocal microscopy , Waveguides , Analog electronics , Profiling , Scanning electron microscopy
Citation
Riza, N. A., Khan, S. A. and and Sheikh, M. A. (2007) 'Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy', Proceddings of SPIE, 6572, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III, 65720Q, Defense and Security Symposium, 2007, Orlando, Florida, United States, 23 May. doi: 10.1117/12.717834
Copyright
© 2007 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.