Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy
Riza, Nabeel A.
Khan, Sajjad A.
Sheikh, Mumtaz A.
Society of Photo-Optical Instrumentation Engineers (SPIE)
An analog liquid crystal lens-based axial scanning confocal microscope is demonstrated as a 48 &mgr;m continuous range optical height measurement sensor used to characterize a 2.3 &mgr;m height Indium Phosphide twin square optical waveguide chip.
Instrumentation, measurement, and metrology , Height measurements , Liquid crystals , Confocal microscopy , Scanning microscopy , Sensors , Liquid crystals , Confocal microscopy , Waveguides , Analog electronics , Profiling , Scanning electron microscopy
Riza, N. A., Khan, S. A. and and Sheikh, M. A. (2007) 'Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy', Proceddings of SPIE, 6572, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III, 65720Q, Defense and Security Symposium, 2007, Orlando, Florida, United States, 23 May. doi: 10.1117/12.717834
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