Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy

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Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy

Riza, Nabeel A.; Khan, Sajjad A.; Sheikh, Mumtaz A.
Date: 2007-05-23
Copyright: © 2007 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Citation: Riza, N. A., Khan, S. A. and and Sheikh, M. A. (2007) 'Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy', Proceddings of SPIE, 6572, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III, 65720Q, Defense and Security Symposium, 2007, Orlando, Florida, United States, 23 May. doi: 10.1117/12.717834
Published Version: 10.1117/12.717834

Abstract:

An analog liquid crystal lens-based axial scanning confocal microscope is demonstrated as a 48 &mgr;m continuous range optical height measurement sensor used to characterize a 2.3 &mgr;m height Indium Phosphide twin square optical waveguide chip.

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