Monolithic MEMS filter banks on RFSOI front-end module
Loading...
Files
Accepted Version
Date
2020-01
Authors
Campanella, Humberto
Qian, You
Romero, Christian O.
Giner, Joan
Kumar, Rakesh
Journal Title
Journal ISSN
Volume Title
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Published Version
Abstract
This work is the first demonstration of a monolithic multiband RF front-end module (RF-FEM), integrating MEMS Lamb-wave filters and switches on 200mm RF silicon-on-insulator (RFSOI) foundry technology. Multiple MEMS filters with photolithography-defined frequencies coexist with RF components in the same wafer. This technology enables vertical integration of RF-FEM components for more compact System-on-Chip (SoC) architectures. The resulting RF-FEMs will then integrate in the same process multi-frequency filter banks, low noise amplifiers (LNAs), and switches, with a footprint reduction up to 50% compared to system-in-package (SiP) modules. The SoC architecture also simplifies the design of interconnection lines and impedance matching networks.
Description
Keywords
Channel bank filters , Low noise amplifiers , Microswitches , Monolithic 3D integration , Photolithography , Radiofrequency filters , Silicon-on-insulator , System-on-chip , Multiple MEMS filters , Monolithic multiband RF front-end module , RF silicon-on-insulator foundry technology , MEMS Lamb-wave filters , RFSOI front-end module , RF-FEM components , RF components , MEMS filters , RF front-end modules , Lamb wave filters , 5G
Citation
Campanella, H., Qian, Y., Romero, C. O., Giner, J., Kumar, R. (2020) 'Monolithic MEMS filter banks on RFSOI front-end module', 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, BC, Canada, 18-22 January, pp. 218-221. doi: 10.1109/MEMS46641.2020.9056227
Link to publisher’s version
Copyright
© 2020, IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.