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Design and characterisation of a compact 4-degree-of-freedom fast steering mirror system based on double Porro prisms for laser beam stabilization
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Accepted Version
Supplementary Data
Date
2021-02-22
Authors
Chang, Yu-Hao
Hao, Guangbo
Liu, Chien-Sheng
Journal Title
Journal ISSN
Volume Title
Publisher
Elsevier B.V.
Published Version
Abstract
This paper proposes a 4-degree-of-freedom (DOF) actuator for a fast steer mirror (FSM) compensation system in order to compensate for 4-DOF laser errors. The mathematic system modeling was built to design and predict the performance of the proposed 4-DOF FSM. Finite element analysis was performed by using a commercial software to analyze the characteristics of the electromagnetic structure and mechanical structure for the proposed 4-DOF FSM. This study further verifies the properties of the proposed 4-DOF FSM by using a laboratory-built prototype. The proposed 4-DOF FSM has the travel range of ±5 mrad and ±0.04 mm along X and Y axes with accuracy of 0.025 mrad and 0.0012 mm and the bandwidth of rotational part and translational part are 10 Hz and 39 Hz, respectively.
Description
Keywords
Fast steer mirror , Laser beam stabilization , Voice coil motor , 4 degree-of-freedom actuator , Flexure structure
Citation
Chang, Y.-H., Hao, G. and Liu, C.-S. (2021) 'Design and characterisation of a compact 4-degree-of-freedom fast steering mirror system based on double Porro prisms for laser beam stabilization', Sensors and Actuators A: Physical, 322, 112639 (11pp). doi: 10.1016/j.sna.2021.112639