Low-voltage phase shifters based on HfxZr1-xO2 ferroelectrics integrated with phased antenna arrays

No Thumbnail Available
EuMC2018_Aldrigo_et_al.pdf(499.62 KB)
Accepted version
Dragoman, Mircea
Aldrigo, Martino
Iordanescu, Sergiu
Modreanu, Mircea
Povey, Ian M.
Vasilache, Dan
Dinescu, Adrian
Romanitan, Cosmin
Journal Title
Journal ISSN
Volume Title
Institute of Electrical and Electronics Engineers, IEEE
Research Projects
Organizational Units
Journal Issue
In this paper, we present the design, fabrication and microwave experimental characterisation of a ferroelectric phase shifter, which is integrated with a 2-element antenna array to achieve beam-steering capabilities at very low voltages of ±1 V. The phase shifter consists of an interdigitated metallic capacitor deposited on a Zr-doped ferroelectric hafnium dioxide (Hf x Zr 1-x O 2 ) thin film, directly grown on high-resistivity Silicon (HR Si). The phase shifter shows a maximum phase shift of 53.74° at 2.55 GHz, sweeping the DC voltage between -1 V and +1 V. The miniaturised phased array is in the form of two gold patch antennas, phase shifters and additional circuitry, all integrated on HfxZr 1-x O 2 /HR Si 4-inch wafer. The radiation beam at 2.55 GHz is steered with 25° when the 7-nm-thick ferroelectric is biased with ±1 V. These new microwave devices represent a step forward in the realisation of low-voltage tunable microwave components for the upcoming 5G technology.
Ferroelectric films , Phased arrays , Thin film devices
Dragoman, M., Aldrigo, M., Iordanescu, S., Modreanu, M., Povey, I., Vasilache, D., Dinescu, A. and Romanitan, C. (2018) 'Low-Voltage Phase Shifters Based on HfxZr1-xO2 Ferroelectrics Integrated with Phased Antenna Arrays', 48th European Microwave Conference (EuMC), Madrid, Spain 23-27 Sept. pp. 950-953. doi: 10.23919/EuMC.2018.8541592
© 2018, IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works