Block copolymer self-assembly based device structures

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dc.contributor.advisor Morris, Michael A. en Rasappa, Sozaraj 2013-09-25T16:30:15Z 2013-09-25T16:30:15Z 2013 2013
dc.identifier.citation Rasappa, S. 2013. Block copolymer self-assembly based device structures. PhD Thesis, University College Cork. en
dc.identifier.endpage 132
dc.description.abstract This thesis investigated the block copolymer (BCP) thin film characteristics and pattern formation using a set of predetermined molecular weights of PS-b-PMMA and PS-b-PDMS. Post BCP pattern fabrication on the required base substrate a dry plasma etch process was utilised for successful pattern transfer of the BCP resist onto underlying substrate. The resultant sub-10 nm device features were used in front end of line (FEoL) fabrication of active device components in integrated circuits (IC). The potential use of BCP templates were further extended to metal and metal-oxide nanowire fabrication. These nanowires were further investigated in real-time applications as novel sensors and supercapacitors. en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher University College Cork en
dc.rights © 2013, Sozaraj Rasappa. en
dc.rights.uri en
dc.subject Block copolymer self-assembly en
dc.subject Sensors en
dc.subject Sub-10nm device fabrication en
dc.subject.lcsh Block copolymers en
dc.subject.lcsh Plasma etching en
dc.subject.lcsh Nanowires en
dc.subject.lcsh Supercapacitors en
dc.title Block copolymer self-assembly based device structures en
dc.type Doctoral thesis en
dc.type.qualificationlevel Doctoral en
dc.type.qualificationname PhD (Science) en
dc.internal.availability Full text available en No embargo required en
dc.description.version Accepted Version
dc.contributor.funder Science Foundation Ireland en
dc.description.status Not peer reviewed en Chemistry en
dc.check.type No Embargo Required
dc.check.reason No embargo required en
dc.check.opt-out Not applicable en
dc.thesis.opt-out false *
dc.check.embargoformat Not applicable en
ucc.workflow.supervisor *
dc.internal.conferring Autumn Conferring 2013 en

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© 2013, Sozaraj Rasappa. Except where otherwise noted, this item's license is described as © 2013, Sozaraj Rasappa.
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