Development of CMOS-compatible electrostatic supercapacitors

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dc.contributor.advisor Quinn, Aidan J. en
dc.contributor.advisor Hurley, Paul K. en Burke, Micheal 2014-01-21T12:03:07Z 2013 2013
dc.identifier.citation Burke, M. 2013. Development of CMOS-compatible electrostatic supercapacitors. PhD Thesis, University College Cork. en
dc.description.abstract This work focuses on development of electrostatic supercapacitors (ESCs) using process routes compatible with complementary metal–oxide–semiconductor (CMOS) fabrication. Wafer-scale anodised aluminium oxide (AAO) processing techniques have been developed to produce high-surface area templates. Statistically optimised atomic layer deposition (ALD) processes have been developed to conformally coat the templates and generate metalinsulator-metal capacitor structures. Detailed electrical characterisation and analysis for a range of devices, revealed ESC’s with high capacitance densities of ~12 μF cm-2 and equivalent energy densities of 0.28 Wh/kg . Finally the suitability of ESC’s toward next generation energy storage applications is discussed. en
dc.description.sponsorship Science Foundation Ireland (FORME) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher University College Cork en
dc.rights © 2013, Michael Burke. en
dc.rights.uri en
dc.subject ALD en
dc.subject Capacitor en
dc.subject.lcsh Supercapacitors en
dc.title Development of CMOS-compatible electrostatic supercapacitors en
dc.type Doctoral thesis en
dc.type.qualificationlevel Doctoral en
dc.type.qualificationname PHD (Engineering) en
dc.internal.availability Full text not available en Indefinite en 10000-01-01
dc.description.version Accepted Version
dc.contributor.funder Science Foundation Ireland en
dc.description.status Not peer reviewed en Tyndall National Institute en
dc.check.reason This thesis is due for publication or the author is actively seeking to publish this material en
dc.check.opt-out Not applicable en
dc.thesis.opt-out false
dc.check.entireThesis Entire Thesis Restricted
dc.check.embargoformat E-thesis on CORA only en
dc.internal.conferring Autumn Conferring 2013

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© 2013, Michael Burke. Except where otherwise noted, this item's license is described as © 2013, Michael Burke.
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