Atomic layer deposition of intermetallic Fe4Zn9 thin films from diethyl zinc

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© 2022, the Authors. Published by American Chemical Society. Open Access. This article is made available under the CC BY 4.0 licence. Except where otherwise noted, this item's license is described as © 2022, the Authors. Published by American Chemical Society. Open Access. This article is made available under the CC BY 4.0 licence.
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