Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors

Show simple item record

dc.contributor.author Miranda, Enrique
dc.contributor.author Jiménez, David
dc.contributor.author Suñé, J.
dc.contributor.author O'Connor, Éamon
dc.contributor.author Monaghan, Scott
dc.contributor.author Povey, Ian M.
dc.contributor.author Cherkaoui, Karim
dc.contributor.author Hurley, Paul K.
dc.date.accessioned 2014-09-03T13:52:20Z
dc.date.available 2014-09-03T13:52:20Z
dc.date.issued 2013
dc.identifier.citation MIRANDA, E., JIMENEZ, D., SUNE, J., O'CONNOR, E., MONAGHAN, S., POVEY, I., CHERKAOUI, K. & HURLEY, P. K. 2013. Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO[sub 2]/Pt capacitors. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 31, 01A107-6. http://dx.doi.org/10.1116/1.4768681 en
dc.identifier.volume 31 en
dc.identifier.issued 1 en
dc.identifier.startpage 01A107-6 en
dc.identifier.issn 1520-8567
dc.identifier.issn 1071-1023
dc.identifier.uri http://hdl.handle.net/10468/1647
dc.identifier.doi 10.1116/1.4768681
dc.description.abstract Filamentary leakage current paths can occur in circular area Pt/HfO2/Pt capacitors as the result of severe electrical stress. The spatial distribution of these paths is investigated using 2D statistical methods. The filamentary paths are associated with important thermal effects occurring inside the HfO2 layer and manifest externally as a random spot pattern on the top Pt electrode. It is shown in this paper that for the devices with the largest areas significant departures from homogeneity are detected close to the peripheries of the structures. These deviations are observed as a lower density of spots than expected for a homogeneous Poisson process. Although the ultimate reason for this anomaly is still under investigation, our results demonstrate that the complete spatial randomness frequently assumed in oxide reliability analysis should not be taken for granted. en
dc.description.sponsorship Science Foundation Ireland (09/IN.1/I2633 INVENT); Ministerio de Ciencia y Tecnología, Spain (TEC2009-09350 (partially funded by the European Union FEDER program)); Departament d'Universitats, Recerca i Societat de la Informació de la Generalitat de Catalunya, Spain (2009SGR783) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher American Institute of Physics / American Vacuum Society en
dc.relation.ispartof 17th Workshop on Dielectrics in Microelectronics 2012 (WoDiM)
dc.rights © 2013 American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The following article appeared in MIRANDA, E., JIMENEZ, D., SUNE, J., O'CONNOR, E., MONAGHAN, S., POVEY, I., CHERKAOUI, K. & HURLEY, P. K. 2013. Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO[sub 2]/Pt capacitors. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 31, 01A107-6. and may be found at http://dx.doi.org/10.1116/1.4768681 en
dc.subject Capacitors en
dc.subject Electrodes en
dc.subject Hafnium compounds en
dc.subject Leakage currents en
dc.subject Platinum en
dc.subject Reliability en
dc.subject Statistical analysis en
dc.subject Stochastic processes en
dc.title Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother Scott Monaghan, Tyndall Micronano Electronics, University College Cork, Cork, Ireland. +353-21-490-3000 Email: scott.monaghan@tyndall.ie en
dc.internal.availability Full text available en
dc.date.updated 2013-03-01T11:40:12Z
dc.description.version Accepted Version en
dc.internal.rssid 198534049
dc.contributor.funder Science Foundation Ireland en
dc.contributor.funder Ministerio de Ciencia y Tecnología, Spain en
dc.contributor.funder Departament d'Universitats, Recerca i Societat de la Informació de la Generalitat de Catalunya, Spain es
dc.description.status Peer reviewed en
dc.identifier.journaltitle Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures en
dc.internal.copyrightchecked No. !! CORA - AIP Article posting policy on free eprint servers. Accepted version and set statement required. en
dc.internal.licenseacceptance Yes en


Files in this item

This item appears in the following Collection(s)

Show simple item record

This website uses cookies. By using this website, you consent to the use of cookies in accordance with the UCC Privacy and Cookies Statement. For more information about cookies and how you can disable them, visit our Privacy and Cookies statement