The morphology of ordered block copolymer patterns as probed by high resolution imaging

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dc.contributor.author Borah, Dipu
dc.contributor.author Ghoshal, Tandra
dc.contributor.author Shaw, Matthew T.
dc.contributor.author Chaudhari, Atul
dc.contributor.author Petkov, Nikolay
dc.contributor.author Bell, A. P.
dc.contributor.author Holmes, Justin D.
dc.contributor.author Morris, Michael A.
dc.date.accessioned 2016-02-29T09:36:08Z
dc.date.available 2016-02-29T09:36:08Z
dc.date.issued 2014-09-22
dc.identifier.citation BORAH, D., GHOSHAL, T., SHAW, M. T., CHAUDHARI, A., PETKOV, N., BELL, A. P., HOLMES, J. D. & MORRIS, M. A. 2014. The Morphology of Ordered Block Copolymer Patterns as Probed by High Resolution Imaging. Nanomaterials and Nanotechnology, 4. doi: 10.5772/59098 en
dc.identifier.volume 4 en
dc.identifier.issued 25 en
dc.identifier.startpage 25(1) en
dc.identifier.endpage 25(13) en
dc.identifier.issn 1847-9804
dc.identifier.uri http://hdl.handle.net/10468/2411
dc.identifier.doi 10.5772/59098
dc.description.abstract The microphase separation of block copolymer (BCP) thin films can afford a simple and cost-effective means to studying nanopattern surfaces, and especially the fabrication of nanocircuitry. However, because of complex interface effects and other complications, their 3D morphology, which is often critical for application, can be more complex than first thought. Here, we describe how emerging microscopic methods may be used to study complex BCP patterns and reveal their rich detail. These methods include helium ion microscopy (HIM) and high resolution x-section transmission electron microscopy (XTEM), and complement conventional secondary electron and atomic force microscopies (SEM and TEM). These techniques reveal that these structures are quite different to what might be expected. We illustrate the advances in the understanding of BCP thin film morphology in several systems, which result from this characterization. The systems described include symmetric, lamellar forming polystyrene-b-polymethylmethacrylate (PS-b-PMMA), cylinder forming polystyrene-b-polydimethylsiloxane (PS-b-PDMS), as well as lamellar and cylinder forming patterns of polystyrene-b-polyethylene oxide (PS-b-PEO) and polystyrene-b-poly-4-vinylpyridine (PS-b-P4VP). Each of these systems exhibits more complex arrangements than might be first thought. Finding and developing techniques whereby complex morphologies, particularly at very small dimensions, can be determined is critical to the practical use of these materials in many applications. The importance of quantifying these complex morphologies has implications for their use in integrated circuit manufacture, where they are being explored as alternative pattern forming methods to conventional UV lithography. en
dc.description.sponsorship Science Foundation Ireland (SFI Research Centre Grant AMBER, SFI 12/RC/2278 and Principal Investigator Grant 09/IN.1/I2602); European Commission (EU ENIAC support for PLACYD) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher InTech en
dc.relation.uri http://www.intechopen.com/journals/nanomaterials_and_nanotechnology
dc.rights © 2014 The Authors. Licensee InTech. This is an open access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. en
dc.rights.uri http://creativecommons.org/licenses/by/3.0/ en
dc.subject Block copolymer en
dc.subject Thin films en
dc.subject Defects en
dc.subject Polystyrene-b-polymethylmethacrylate en
dc.subject Polystyrene-b-polyvinylypyridine en
dc.subject Polystyrene-b-polyethylene oxide en
dc.subject Polystyrene-b-polydimethyl siloxane en
dc.subject Electron microscopy en
dc.subject Helium ion microscopy en
dc.title The morphology of ordered block copolymer patterns as probed by high resolution imaging en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother Justin D. Holmes, Chemistry, University College Cork, Cork, Ireland. +353-21-490-3000 Email: j.holmes@ucc.ie en
dc.internal.availability Full text available en
dc.date.updated 2015-05-26T10:34:22Z
dc.description.version Published Version en
dc.internal.rssid 303353344
dc.contributor.funder Science Foundation Ireland en
dc.contributor.funder European Commission en
dc.description.status Peer reviewed en
dc.identifier.journaltitle Nanomaterials and Nanotechnology en
dc.internal.copyrightchecked No. !!CORA!! InTech is a SHERPA/RoMEO green publisher. "As an open access publisher, InTech supports self-archiving and encourages authors to deposit their articles and chapters in institutional repositories." http://www.intechopen.com/open-access-mandates.html en
dc.internal.licenseacceptance Yes en
dc.internal.IRISemailaddress j.holmes@ucc.ie en


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© 2014 The Authors. Licensee InTech. This is an open access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. Except where otherwise noted, this item's license is described as © 2014 The Authors. Licensee InTech. This is an open access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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