Electrochemical pore formation on InP in alkaline solutions
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Date
2001-09
Authors
Harvey, E.
O'Dwyer, Colm
Melly, T.
Buckley, D. Noel
Cunnane, V. J.
Sutton, David
Newcomb, Simon B.
Chu, S. N. G.
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Electrochemical Society
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Abstract
The surface properties of InP electrodes were examined following anodization in (NH4)2S and KOH electrolytes. In both solutions, the observation of current peaks in the cyclic voltammetric curves was attributed to selective etching of the substrate and a film formation process. AFM images of samples anodized in the sulfide solution, revealed surface pitting and TEM micrographs revealed the porous nature of the film formed on top of the pitted substrate. After anodization in the KOH electrolyte, TEM images revealed that a porous layer extending 500 nm into the substrate had been formed. Analysis of the composition of the anodic products indicates the presence of In2S3 in films grown in (NH4)2S and an In2O3 phase within the porous network formed in KOH.
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Keywords
InP electrodes , Anodization , KOH electrolyte , Transmission electron microscopy , Anodic products
Citation
Harvey, E., O’ Dwyer, C., Melly, T., Buckley, D. N., Cunnane, V. J., Sutton, D., Newcomb, S. B. and Chu, S. N. G. (2001) 'Electrochemical Pore Formation on InP in Alkaline Solutions', State-of-the-Art Program on Compound Semiconductors XXXV, 200th Meeting of the Electrochemical Society , 2-9 September, San Francisco, California, in Proceedings - Electrochemical Society, Vol. 20, pp. 87-95. ISBN 1566773539
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© 2001, Electrochemical Society