Magnetic multilayer fabrication technology with selective activation of SU-8 films

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dc.contributor.author Anthony, Ricky en
dc.contributor.author Ó Mathúna, S. Cian en
dc.contributor.author Rohan, James F. en
dc.date.accessioned 2016-11-29T14:52:30Z
dc.date.available 2016-11-29T14:52:30Z
dc.date.issued 2016-11
dc.identifier.citation Anthony, R., Ó Mathúna, C. & Rohan, J. F. (2016) ‘Magnetic Multilayer Fabrication Technology with Selective Activation of SU-8 Films’, Journal of Physics: Conference Series, 757, 012031. doi: 10.1088/1742-6596/757/1/012031 en
dc.identifier.volume 757 en
dc.identifier.startpage 012031-1 en
dc.identifier.endpage 012031-7 en
dc.identifier.issn 1742-6588
dc.identifier.uri http://hdl.handle.net/10468/3321
dc.identifier.doi 10.1088/1742-6596/757/1/012031
dc.description.abstract Developing magnetic multilayers are essential for reducing the core eddy current losses in the integrated power magnetic components (inductors/transformers). PVD based processes are typically used to achieve the multilayers with thin dielectric spacers. However, those processes are costly, and can be difficult to integrate. It is evident that cost effective alternative is needed. In recent years, electrochemical processes have been investigated to address these issues. One such method would be to successive metallization of insulating photoresists acting as spacer layer (such as SU-8) with soft magnetic films (such as Ni-Fe-Co alloys). This paper describes an experimental procedure to fabricate magnetic multilayers with a thin variant of SU-8 2 (< 1.5 µm) as inter-layers for integrated micro-inductors/transformers for power conversion applications. en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher IOP Publishing en
dc.rights © 2016, The Authors. Published under licence by IOP Publishing Ltd. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. en
dc.rights.uri https://creativecommons.org/licenses/by/3.0/ en
dc.subject Power conversion circuitry en
dc.subject Magnetic multilayers en
dc.subject Micro-inductors en
dc.subject Micro transformers en
dc.subject Power conversion applications. en
dc.title Magnetic multilayer fabrication technology with selective activation of SU-8 films en
dc.type Article (peer-reviewed) en
dc.internal.availability Full text available en
dc.description.version Published Version en
dc.internal.rssid 477477094
dc.contributor.funder European Commission en
dc.contributor.funder Seventh Framework Programme en
dc.description.status Peer reviewed en
dc.identifier.journaltitle Journal of Physics: Conference Series en
dc.internal.IRISemailaddress james.rohan@tyndall.ie en
dc.internal.IRISemailaddress cian.omathuna@tyndall.ie en
dc.relation.project info:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318529/EU/POWER SoC With Integrated PassivEs/POWERSWIPE en


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© 2016, The Authors. Published under licence by IOP Publishing Ltd. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Except where otherwise noted, this item's license is described as © 2016, The Authors. Published under licence by IOP Publishing Ltd. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
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