A silicon-based MEMS vibrating mesh nebulizer for inhaled drug delivery

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dc.contributor.author Olszewski, Oskar Zbigniew
dc.contributor.author MacLoughlin, Ronan
dc.contributor.author Blake, Alan
dc.contributor.author O'Neill, Mike
dc.contributor.author Mathewson, Alan
dc.contributor.author Jackson, Nathan
dc.date.accessioned 2017-02-10T10:33:19Z
dc.date.available 2017-02-10T10:33:19Z
dc.date.issued 2017-01-04
dc.identifier.citation Olszewski, O. Z., MacLoughlin, R., Blake, A., O’Neill, M., Mathewson, A. and Jackson, N. (2016) ‘A silicon-based MEMS vibrating mesh nebulizer for inhaled drug delivery’, Procedia Engineering, 168, pp. 1521-1524. doi:10.1016/j.proeng.2016.11.451 en
dc.identifier.volume 168 en
dc.identifier.startpage 1521 en
dc.identifier.endpage 1524 en
dc.identifier.issn 1877-7058
dc.identifier.uri http://hdl.handle.net/10468/3616
dc.identifier.doi 10.1016/j.proeng.2016.11.451
dc.description.abstract This paper presents a silicon-based MEMS vibrating mesh nebulizer capable of producing micro droplets for inhaled drug delivery. The device concept, design, fabrication, and measurements are presented. The core element of the nebulizer (vibrating mesh) was fabricated using silicon process and consists of 1000 tapered micro-sized apertures. During operation the mesh vibrates at high frequency with the bending profile corresponding to the 02 resonance mode. The droplet diameter measured at the device output is 3.75 mu m and a typical output rate is 0.45 ml / min. en
dc.description.uri http://eurosensors.akcongress.com/ en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher Elsevier Ltd en
dc.relation.ispartof Eurosensors 2016 - 30th Anniversary Eurosensors Conference
dc.rights © 2016, the Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/) en
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/4.0/ en
dc.subject Nebulizer en
dc.subject MEMS en
dc.subject Silicon en
dc.subject Piezoelectric en
dc.subject Aerosol en
dc.subject Liquid atomization en
dc.title A silicon-based MEMS vibrating mesh nebulizer for inhaled drug delivery en
dc.type Conference item en
dc.internal.authorcontactother Alan Mathewson, Tyndall Microsystems, University College Cork, Cork, Ireland. +353-21-490-3000 Email: a.mathewson@tyndall.ie en
dc.internal.availability Full text available en
dc.date.updated 2017-02-10T10:12:03Z
dc.description.version Published Version en
dc.internal.rssid 383036616
dc.internal.wokid WOS:000391641300367
dc.contributor.funder Collaborative Centre for Applied Nanotechnology en
dc.contributor.funder Enterprise Ireland en
dc.contributor.funder Analog Devices en
dc.contributor.funder Aerogen Ltd, Ireland
dc.description.status Peer reviewed en
dc.identifier.journaltitle Procedia Engineering en
dc.internal.copyrightchecked Yes en
dc.internal.licenseacceptance Yes en
dc.internal.conferencelocation Budapest, Hungary en
dc.internal.IRISemailaddress a.mathewson@tyndall.ie en


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© 2016, the Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/) Except where otherwise noted, this item's license is described as © 2016, the Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
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