dc.contributor.author |
Anthony, Ricky |
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dc.contributor.author |
Wang, Ningning |
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dc.contributor.author |
Casey, Declan P. |
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dc.contributor.author |
Ó Mathúna, S. Cian |
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dc.contributor.author |
Rohan, James F. |
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dc.date.accessioned |
2017-03-01T12:13:41Z |
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dc.date.available |
2017-03-01T12:13:41Z |
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dc.date.issued |
2015-12-29 |
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dc.identifier.citation |
Anthony, R., Wang, N., Casey, D. P., Ó Mathúna, C. and Rohan, J. F. (2016) 'MEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substrates', Journal of Magnetism and Magnetic Materials, 406, pp. 89-94. doi:10.1016/j.jmmm.2015.12.099 |
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dc.identifier.volume |
406 |
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dc.identifier.startpage |
89 |
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dc.identifier.endpage |
94 |
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dc.identifier.issn |
0304-8853 |
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dc.identifier.uri |
http://hdl.handle.net/10468/3715 |
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dc.identifier.doi |
10.1016/j.jmmm.2015.12.099 |
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dc.description.abstract |
A surface micro-machining process is described to realize planar inductors on ferrite (Ni0.49Zn0.33Cu0.18 Fe2O4) for high-frequency applications (<30 MHz). The highly resistive nature (~108 Ω m) of the Ni–Cu–Zn substrate allows direct conductor patterning by electroplating of Cu windings through a photoresist mold on a sputtered seed layer and eliminates the need for a dielectric layer to isolate the windings from the bottom magnetic core. Measured inductances~367 nH (DC resistance~1.16 Ω and Q-value>14 at 30 MHz) and ~244 nH (DC resistance~0.86 Ω and Q-value~18 at 30 MHz) at 1 MHz for elongated racetrack (10.75 nH/mm2) and racetrack inductors (12.5 nH/mm2), respectively show good agreement with simulated finite element method analysis. This device can be integrated with power management ICs PMICs for cost-effective, high-performance realization of power-supply in package (PSiP) or on-chip (PSoC). This simple process lays the foundation for fabricating closed core ferrite nano-crystalline core micro-inductors. |
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dc.format.mimetype |
application/pdf |
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dc.language.iso |
en |
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dc.publisher |
Elsevier |
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dc.rights |
© 2015 Elsevier B.V. This manuscript version is made available under the CC-BY-NC-ND 4.0 license |
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dc.rights.uri |
http://creativecommons.org/licenses/by-nc-nd/4.0/ |
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dc.subject |
Ferrite |
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dc.subject |
Micro-fabrication |
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dc.subject |
Micro-Inductors |
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dc.subject |
Integrated magnetics |
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dc.subject |
DC–DC converters |
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dc.title |
MEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substrates |
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dc.type |
Article (peer-reviewed) |
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dc.internal.authorcontactother |
James Rohan, Tyndall Microsystems, University College Cork, Cork, Ireland. +353-21-490-3000 Email: james.rohan@tyndall.ie |
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dc.internal.availability |
Full text available |
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dc.check.info |
Access to this item is restricted until 24 months after publication by the request of the publisher. |
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dc.check.date |
2017-12-29 |
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dc.date.updated |
2017-03-01T12:03:28Z |
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dc.description.version |
Accepted Version |
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dc.internal.rssid |
352483093 |
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dc.internal.rssid |
477477054 |
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dc.contributor.funder |
European Commission
|
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dc.contributor.funder |
Seventh Framework Programme
|
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dc.description.status |
Peer reviewed |
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dc.identifier.journaltitle |
Journal of Magnetism and Magnetic Materials |
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dc.internal.copyrightchecked |
No !!CORA!! |
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dc.internal.licenseacceptance |
Yes |
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dc.internal.IRISemailaddress |
james.rohan@tyndall.ie |
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dc.internal.IRISemailaddress |
cian.omathuna@ucc.ie |
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dc.relation.project |
info:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318529/EU/POWER SoC With Integrated PassivEs/POWERSWIPE
|
en |