MEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substrates

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dc.contributor.author Anthony, Ricky
dc.contributor.author Wang, Ningning
dc.contributor.author Casey, Declan P.
dc.contributor.author Ó Mathúna, S. Cian
dc.contributor.author Rohan, James F.
dc.date.accessioned 2017-03-01T12:13:41Z
dc.date.available 2017-03-01T12:13:41Z
dc.date.issued 2015-12-29
dc.identifier.citation Anthony, R., Wang, N., Casey, D. P., Ó Mathúna, C. and Rohan, J. F. (2016) 'MEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substrates', Journal of Magnetism and Magnetic Materials, 406, pp. 89-94. doi:10.1016/j.jmmm.2015.12.099 en
dc.identifier.volume 406 en
dc.identifier.startpage 89 en
dc.identifier.endpage 94 en
dc.identifier.issn 0304-8853
dc.identifier.uri http://hdl.handle.net/10468/3715
dc.identifier.doi 10.1016/j.jmmm.2015.12.099
dc.description.abstract A surface micro-machining process is described to realize planar inductors on ferrite (Ni0.49Zn0.33Cu0.18 Fe2O4) for high-frequency applications (<30 MHz). The highly resistive nature (~108 Ω m) of the Ni–Cu–Zn substrate allows direct conductor patterning by electroplating of Cu windings through a photoresist mold on a sputtered seed layer and eliminates the need for a dielectric layer to isolate the windings from the bottom magnetic core. Measured inductances~367 nH (DC resistance~1.16 Ω and Q-value>14 at 30 MHz) and ~244 nH (DC resistance~0.86 Ω and Q-value~18 at 30 MHz) at 1 MHz for elongated racetrack (10.75 nH/mm2) and racetrack inductors (12.5 nH/mm2), respectively show good agreement with simulated finite element method analysis. This device can be integrated with power management ICs PMICs for cost-effective, high-performance realization of power-supply in package (PSiP) or on-chip (PSoC). This simple process lays the foundation for fabricating closed core ferrite nano-crystalline core micro-inductors. en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher Elsevier en
dc.rights © 2015 Elsevier B.V. This manuscript version is made available under the CC-BY-NC-ND 4.0 license en
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/4.0/ en
dc.subject Ferrite en
dc.subject Micro-fabrication en
dc.subject Micro-Inductors en
dc.subject Integrated magnetics en
dc.subject DC–DC converters en
dc.title MEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substrates en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother James Rohan, Tyndall Microsystems, University College Cork, Cork, Ireland. +353-21-490-3000 Email: james.rohan@tyndall.ie en
dc.internal.availability Full text available en
dc.check.info Access to this item is restricted until 24 months after publication by the request of the publisher. en
dc.check.date 2017-12-29
dc.date.updated 2017-03-01T12:03:28Z
dc.description.version Accepted Version en
dc.internal.rssid 352483093
dc.internal.rssid 477477054
dc.contributor.funder European Commission en
dc.contributor.funder Seventh Framework Programme en
dc.description.status Peer reviewed en
dc.identifier.journaltitle Journal of Magnetism and Magnetic Materials en
dc.internal.copyrightchecked No !!CORA!! en
dc.internal.licenseacceptance Yes en
dc.internal.IRISemailaddress james.rohan@tyndall.ie en
dc.internal.IRISemailaddress cian.omathuna@ucc.ie en
dc.relation.project info:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318529/EU/POWER SoC With Integrated PassivEs/POWERSWIPE en


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© 2015 Elsevier B.V. This manuscript version is made available under the CC-BY-NC-ND 4.0 license Except where otherwise noted, this item's license is described as © 2015 Elsevier B.V. This manuscript version is made available under the CC-BY-NC-ND 4.0 license
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