Growth and high frequency characterization of Mn doped sol-gel PbxSr1-xTiO3 for frequency agile applications
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Date
2009-03-16
Authors
Fragkiadakis, C.
Lueker, A.
Wright, R. V.
Floyd, Liam
Kirby, P. B.
Journal Title
Journal ISSN
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Publisher
AIP Publishing
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Abstract
In pursuit of thin film ferroelectric materials for frequency agile applications that are both easily adapted to large area deposition and also high performance, an investigation has been carried out into sol-gel deposition of 3% Mn doped (Pb0.4Sr0.6)TiO3. Large area capability has been demonstrated by growth of films with good crystallinity and grain structure on 4 in. Si wafers. Metal-insulator-metal capacitors have also been fabricated and development of an improved de-embedding technique that takes parasitic impedances fully into account has enabled accurate extraction of the high frequency dielectric properties of the PbxSr1-xTiO3 films. Practically useful values of epsilon similar to 1000, tan delta similar to 0.03, and tunability similar to 50% have been obtained in the low gigahertz range (1-5 GHz). Peaks in the dielectric loss due to acoustic resonance have been modeled and tentatively identified as due to an electrostrictive effect with an electromechanical coupling coefficient of similar to 0.04 at an electric field of 240 kV/cm which is potentially useful for tunable thin film bulk acoustic wave devices.
Description
Keywords
Acoustic resonance , Acoustic waves , Dielectric losses , Doping profiles , Electrostriction , Ferroelectric capacitors , Ferroelectric thin films , Grain size , High-frequency effects , Lead compounds , Manganese , MIM structures , Permittivity , Platinum , Silicon , Silicon compounds , Sol-gel processing , Strontium compounds , Titanium , Capacitors , Electrodes , Thin film structure , Dielectric thin films , Thin film deposition
Citation
Fragkiadakis, C., Lüker, A., Wright, R. V., Floyd, L. and Kirby, P. B. (2009) 'Growth and high frequency characterization of Mn doped sol-gel PbxSr1−xTiO3 for frequency agile applications', Journal of Applied Physics, 105(6), pp. 061635. doi: 10.1063/1.3078767
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© 2009 American Institute of Physics, This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Fragkiadakis, C., Lüker, A., Wright, R. V., Floyd, L. and Kirby, P. B. (2009) 'Growth and high frequency characterization of Mn doped sol-gel PbxSr1−xTiO3 for frequency agile applications', Journal of Applied Physics, 105(6), pp. 061635. doi: 10.1063/1.3078767 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.3078767