Vibration based electromagnetic micropower generator on silicon

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dc.contributor.author Kulkarni, Santosh
dc.contributor.author Roy, Saibal
dc.contributor.author O'Donnell, Terence
dc.contributor.author Beeby, S.
dc.contributor.author Tudor, J.
dc.date.accessioned 2017-07-12T09:07:46Z
dc.date.available 2017-07-12T09:07:46Z
dc.date.issued 2006-04-27
dc.identifier.citation Kulkarni, S., Roy, S., O’Donnell, T., Beeby, S. and Tudor, J. (2006) 'Vibration based electromagnetic micropower generator on silicon', Journal of Applied Physics, 99(8), pp. 08P511. doi: 10.1063/1.2176089 en
dc.identifier.volume 99
dc.identifier.issued 8
dc.identifier.startpage 1
dc.identifier.endpage 3
dc.identifier.issn 0021-8979
dc.identifier.uri http://hdl.handle.net/10468/4230
dc.identifier.doi 10.1063/1.2176089
dc.description.abstract This paper discusses the theory, design and simulation of electromagnetic micropower generators with electroplated micromagnets. The power generators are fabricated using standard microelectromechanical system processing techniques. Electromagnetic two-dimensional finite element anlysis simulations are used to determine voltage and power that can be generated from different designs. This paper reports a maximum voltage and power of 55 mV and 70 mu W for the first design, incorporating microfabricated two-layer Cu coils on a Si paddle vibrating between two sets of oppositely polarized electroplated Co50Pt50 face centered tetragonal phase hard magnets. A peak voltage and power of 950 mV and 85 mu W are obtained for the second design, which includes electroplated Ni45Fe55 as a soft magnetic layer underneath the hard magnets. The volume of the device is about 30 mm(3). en
dc.description.sponsorship European Commission (European Union Framework 6 STREP project VIBES (507911)) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher AIP Publishing en
dc.relation.uri http://aip.scitation.org/doi/abs/10.1063/1.2176089
dc.rights © 2006 American Institute of Physics, This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Rohr, C., Abbott, P., Ballard, I., Connolly, J. P., Barnham, K. W. J., Mazzer, M., Button, C., Nasi, L., Hill, G., Roberts, J. S., Clarke, G. and Ginige, R. (2006) 'InP-based lattice-matched InGaAsP and strain-compensated InGaAs∕InGaAs quantum well cells for thermophotovoltaic applications', Journal of Applied Physics, 100(11), pp. 114510 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.2176089 en
dc.subject Systems en
dc.subject Electrodeposition en
dc.subject Films en
dc.subject Magnets en
dc.subject Coils en
dc.subject Microelectromechanical systems en
dc.subject Silicon en
dc.subject Vibration resonance en
dc.title Vibration based electromagnetic micropower generator on silicon en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother Saibal Roy, Tyndall National Institute, University College Cork, Cork, Ireland +353-21-490-3000 E-mail: saibal.roy@tyndall.ie en
dc.internal.availability Full text available en
dc.description.version Published Version en
dc.contributor.funder Sixth Framework Programme
dc.description.status Peer reviewed en
dc.identifier.journaltitle Journal of Applied Physics en
dc.internal.IRISemailaddress saibal.roy@tyndall.ie en
dc.identifier.articleid 08P511


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