Influence of substrate miscut angle on surface morphology and luminescence properties of AlGaN

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dc.contributor.author Kusch, Gunnar
dc.contributor.author Li, Haoning
dc.contributor.author Edwards, Paul R.
dc.contributor.author Bruckbauer, Jochen
dc.contributor.author Sadler, Thomas C.
dc.contributor.author Parbrook, Peter J.
dc.contributor.author Martin, Robert W.
dc.date.accessioned 2017-07-25T14:16:23Z
dc.date.available 2017-07-25T14:16:23Z
dc.date.issued 2014
dc.identifier.citation Kusch, G., Li, H., Edwards, P. R., Bruckbauer, J., Sadler, T. C., Parbrook, P. J. and Martin, R. W. (2014) 'Influence of substrate miscut angle on surface morphology and luminescence properties of AlGaN', Applied Physics Letters, 104(9), pp. 092114. doi: 10.1063/1.4867165 en
dc.identifier.volume 104
dc.identifier.issued 9
dc.identifier.startpage 1
dc.identifier.endpage 4
dc.identifier.issn 0003-6951
dc.identifier.issn 1077-3118
dc.identifier.uri http://hdl.handle.net/10468/4258
dc.identifier.doi 10.1063/1.4867165
dc.description.abstract The influence of substrate miscut on Al0.5Ga0.5N layers was investigated using cathodoluminescence (CL) hyperspectral imaging and secondary electron imaging in an environmental scanning electron microscope. The samples were also characterized using atomic force microscopy and high resolution X-ray diffraction. It was found that small changes in substrate miscut have a strong influence on the morphology and luminescence properties of the AlGaN layers. Two different types are resolved. For low miscut angle, a crack-free morphology consisting of randomly sized domains is observed, between which there are notable shifts in the AlGaN near band edge emission energy. For high miscut angle, a morphology with step bunches and compositional inhomogeneities along the step bunches, evidenced by an additional CL peak along the step bunches, are observed. (C) 2014 Author(s). en
dc.description.sponsorship Engineering and Physical Sciences Research Council of the UK (EP/I029141/1); Science Foundation Ireland (10\IN.1\I2993, 07\EN\E001A); Irish Research Council en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher AIP Publishing en
dc.relation.uri http://aip.scitation.org/doi/abs/10.1063/1.4867165
dc.rights © 2014 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Kusch, G., Li, H., Edwards, P. R., Bruckbauer, J., Sadler, T. C., Parbrook, P. J. and Martin, R. W. (2014) 'Influence of substrate miscut angle on surface morphology and luminescence properties of AlGaN', Applied Physics Letters, 104(9), pp. 092114 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.4871086 en
dc.subject Chemical-vapor-deposition en
dc.subject Buffer layer en
dc.subject Cathodoluminescence en
dc.subject Microscopy en
dc.subject Epilayers en
dc.subject Films en
dc.subject Cathodoluminescence en
dc.subject III-V semiconductors en
dc.subject Surface morphology en
dc.subject Luminescence en
dc.subject Semiconductor growth en
dc.title Influence of substrate miscut angle on surface morphology and luminescence properties of AlGaN en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother Haiyang Li, Tyndall National Institute, University College Cork, Cork, Ireland +353 (0)21 2346606, Email: haiyang.li@tyndall.ie en
dc.internal.availability Full text available en
dc.description.version Published Version en
dc.internal.wokid WOS:000332729200051
dc.contributor.funder Engineering and Physical Sciences Research Council
dc.contributor.funder Science Foundation Ireland
dc.contributor.funder Irish Research Council
dc.description.status Peer reviewed en
dc.identifier.journaltitle Applied Physics Letters en
dc.internal.IRISemailaddress haiyang.li@tyndall.ie en
dc.identifier.articleid 92114


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