A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches

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A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches

Ryan, Cormac; Olszewski, Oskar Zbigniew; Houlihan, Ruth; O'Mahony, Conor; Duane, Russell
Date: 2014
Copyright: © 2014 AIP Publishing LLC.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Ryan, C., Olszewski, Z., Houlihan, R., O'Mahony, C. and Duane, R. (2014) 'A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches', Applied Physics Letters, 104(6), pp. 061908 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.4865584
Related: http://aip.scitation.org/doi/abs/10.1063/1.4865584
Citation: Ryan, C., Olszewski, Z., Houlihan, R., O'Mahony, C. and Duane, R. (2014) 'A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches', Applied Physics Letters, 104(6), pp. 061908. doi: 10.1063/1.4865584
Published Version: 10.1063/1.4865584

Abstract:

A bipolar hold-down voltage was used to study mechanical degradation in radio-frequency microelectromechanical capacitive shunt switches. The bipolar signal was used to prevent the occurrence of dielectric charging and to isolate mechanical effects. The characteristics of material stress relaxation and recovery were monitored by recording the change of the pull-in voltage of a device. The creep effect in movable components was saturated by repeated actuation to the pulled-in position, while comparison with a theoretical model confirmed the presence of linear viscoelasticity in the devices. (C) 2014 AIP Publishing LLC.

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