Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches

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dc.contributor.author Olszewski, Oskar Zbigniew
dc.contributor.author Houlihan, Ruth
dc.contributor.author Ryan, Cormac
dc.contributor.author O'Mahony, Conor
dc.contributor.author Duane, Russell
dc.date.accessioned 2017-07-28T10:48:28Z
dc.date.available 2017-07-28T10:48:28Z
dc.date.issued 2012
dc.identifier.citation Olszewski, Z., Houlihan, R., Ryan, C., O’Mahony, C. and Duane, R. (2012) 'Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches', Applied Physics Letters, 100(23), pp. 233505. doi: 10.1063/1.4726116 en
dc.identifier.volume 100
dc.identifier.issued 23
dc.identifier.startpage 1
dc.identifier.endpage 4
dc.identifier.issn 0003-6951
dc.identifier.issn 1077-3118
dc.identifier.uri http://hdl.handle.net/10468/4299
dc.identifier.doi 10.1063/1.4726116
dc.description.abstract DC and bipolar voltage stresses are used to isolate mechanical degradation of the movable electrode from charging mechanism in microelectromechanical capacitive switches. Switches with different metals as the movable electrode were investigated. In titanium switches, a shift in the pull-in voltages is observed after dc stressing whereas no shift occurs after the bipolar stressing, which is to be expected from charging theory. On switches with similar dielectric but made of aluminium, the narrowing effect occurs regardless if dc or bipolar stressing is used, which indicates the mechanical degradation as the mechanism responsible. (C) 2012 American Institute of Physics. (http://dx.doi.org/10.1063/1.4726116) en
dc.description.sponsorship European Space Agency and Irish Research Council for Science, Engineering and Technology (through the Networking and Partnership Initiative (NPI)); Science Foundation Ireland (SFI 10/RFP/ECE2883)) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher AIP Publishing en
dc.relation.uri http://aip.scitation.org/doi/abs/10.1063/1.4726116
dc.rights © 2012 American Institute of Physics.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Viktorov, E. A., Erneux, T., Piwonski, T., Pulka, J., Huyet, G. and Houlihan, J. (2012) 'Pump dependence of the dynamics of quantum dot based waveguide absorbers', Applied Physics Letters, 100(24), pp. 241108 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.4729155 en
dc.subject Electrodes en
dc.subject Aluminium en
dc.subject Titanium en
dc.subject Dielectrics en
dc.subject Microelectromechanical systems en
dc.title Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother Zbigniew Olszewski, Tyndall National Institute, University College Cork, Cork, Ireland +353-21- 490-3000, E-mail: zbigniew.olszewski@tyndall.ie en
dc.internal.availability Full text available en
dc.description.version Published Version en
dc.internal.wokid WOS:000305089900094
dc.contributor.funder European Space Agency
dc.contributor.funder Irish Research Council for Science, Engineering and Technology
dc.contributor.funder Science Foundation Ireland
dc.description.status Peer reviewed en
dc.identifier.journaltitle Applied Physics Letters en
dc.internal.IRISemailaddress zbigniew.olszewski@tyndall.ie en
dc.internal.IRISemailaddress conor.omahony@tyndall.ie en
dc.identifier.articleid 233505

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