Multi-frequency MEMS electromagnetic energy harvesting

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dc.contributor.author Mallick, Dhiman
dc.contributor.author Constantinou, Peter
dc.contributor.author Podder, Pranay
dc.contributor.author Roy, Saibal
dc.date.accessioned 2017-09-12T09:02:09Z
dc.date.available 2017-09-12T09:02:09Z
dc.date.issued 2017-08-08
dc.identifier.citation Mallick, D., Constantinou, P., Podder, P. and Roy, S. (2017) 'Multi-frequency MEMS electromagnetic energy harvesting', Sensors and Actuators A: Physical, 264, pp. 247-259. doi:10.1016/j.sna.2017.08.002 en
dc.identifier.volume 264 en
dc.identifier.startpage 247 en
dc.identifier.endpage 259 en
dc.identifier.issn 0924-4247
dc.identifier.uri http://hdl.handle.net/10468/4683
dc.identifier.doi 10.1016/j.sna.2017.08.002
dc.description.abstract We report multi-frequency MEMS electromagnetic energy harvesters employing two different topologies. The first is a single mass system, where different fundamental modes are obtained within a close frequency range through spring design innovation and by using a large magnetic proof mass. The second is a dual mass system, which inherently has two major vibration modes corresponding to the movement of each of the masses. In comparison to the reported MEMS scale electromagnetic generators, substantial improvement in the output power is achieved in our design primarily by using the bulk NdFeB magnet as proof mass. This enhanced performance is validated by benchmarking against a normalized power density parameter. The spring structures are fabricated on Silicon-on-Insulator (SOI) substrate while voltage is induced in electroplated double layer copper coils. The 3D finite element analysis on the devices shows that different modes are activated in the low frequency region. The out-of-plane and torsional modes of the single mass systems are obtained at 188, 255.1 and 287.9 Hz, respectively whereas the first two modes of dual mass device are at 241.4 Hz and 419.6 Hz respectively. At 0.5 g, the single mass device produces 0.37, 0.43 and 0.32 μW respectively in mode I, II and III whereas the dual mass device generates 0.22 and 0.024 μW in mode I and II respectively against matched load. The experimental results are qualitatively explained using the simulation results and indicate a good potential in the development of multi-frequency energy harvesters for a number of practical applications. en
dc.description.sponsorship Science Foundation Ireland (Grant No. SFI-11/PI/1201) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher Elsevier Ltd en
dc.rights © 2017, Elsevier Ltd. All rights reserved. This manuscript version is made available under the CC-BY-NC-ND 4.0 license. en
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/4.0/ en
dc.subject MEMS en
dc.subject Internet of things en
dc.subject Energy harvesting en
dc.subject Electromagnetic en
dc.subject Wideband en
dc.subject Multi-frequency en
dc.subject Vibration en
dc.subject Silicon-on-insulator en
dc.subject Micro-coil en
dc.title Multi-frequency MEMS electromagnetic energy harvesting en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother Saibal Roy, Tyndall Microsystems, University College Cork, Cork, Ireland. +353-21-490-3000 Email: saibal.roy@tyndall.ie en
dc.internal.availability Full text available en
dc.check.info Access to this article is restricted until 24 months after publication by request of the publisher. en
dc.check.date 2019-08-08
dc.date.updated 2017-09-12T08:55:33Z
dc.description.version Accepted Version en
dc.internal.rssid 410774554
dc.contributor.funder Science Foundation Ireland en
dc.description.status Peer reviewed en
dc.identifier.journaltitle Sensors and Actuators A: Physical en
dc.internal.copyrightchecked Yes en
dc.internal.licenseacceptance Yes en
dc.internal.IRISemailaddress saibal.roy@tyndall.ie en


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© 2017, Elsevier Ltd. All rights reserved. This manuscript version is made available under the CC-BY-NC-ND 4.0 license. Except where otherwise noted, this item's license is described as © 2017, Elsevier Ltd. All rights reserved. This manuscript version is made available under the CC-BY-NC-ND 4.0 license.
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