Development of a microelectromechanical system (MEMS)-based multisensor platform for environmental monitoring

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dc.contributor.author Hautefeuille, Mathieu
dc.contributor.author O'Flynn, Brendan
dc.contributor.author Peters, Frank H.
dc.contributor.author O'Mahony, Conor
dc.date.accessioned 2012-01-10T17:23:40Z
dc.date.available 2012-01-10T17:23:40Z
dc.date.issued 2011-11
dc.identifier.citation Hautefeuille, Mathieu;O'Flynn, Brendan;Peters, Frank H.;O'Mahony, Conor (2011) 'Development of a Microelectromechanical System (MEMS)-Based Multisensor Platform for Environmental Monitoring'. Micromachines, 2 (44):410-430410. en
dc.identifier.volume 2 en
dc.identifier.issued 44 en
dc.identifier.startpage 410 en
dc.identifier.endpage 430410 en
dc.identifier.issn 2072-666X
dc.identifier.uri http://hdl.handle.net/10468/490
dc.identifier.doi 10.3390/mi2040410
dc.description.abstract Recent progress in data processing, communications and electronics miniaturization is now enabling the development of low-cost wireless sensor networks (WSN), which consist of spatially distributed autonomous sensor modules that collaborate to monitor real-time environmental conditions unobtrusively and with appropriate levels of spatial and temporal granularity. Recent and future applications of this technology range from preventative maintenance and quality control to environmental modelling and failure analysis. In order to fabricate these low-cost, low-power reliable monitoring platforms, it is necessary to improve the level of sensor integration available today. This paper outlines the microfabrication and characterization results of a multifunctional multisensor unit. An existing fabrication process for Complementary Metal Oxide Semiconductor CMOS-compatible microelectromechanical systems (MEMS) structures has been modified and extended to manufacture temperature, relative humidity, corrosion, gas thermal conductivity, and gas flow velocity sensors on a single silicon substrate. A dedicated signal conditioning circuit layer has been built around this MEMS multisensor die for integration on an existing low-power WSN module. The final unit enables accurate readings and cross-sensitivity compensation thanks to a combination of simultaneous readings from multiple sensors. Real-time communication to the outside world is ensured via radio-frequency protocols, and data collection in a serial memory is also made possible for diagnostics applications. en
dc.description.sponsorship Science Foundation Ireland (Centre for Telecommunications Value-Chain Research); Science Foundation Ireland (CSET - Centre for Science, Engineering and Technology, Grant No. 07/CE/11147) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher MDPI Publishing en
dc.relation.uri http://www.mdpi.com/2072-666X/2/4/410/
dc.rights © 2011 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license. en
dc.rights.uri http://creativecommons.org/licenses/by/3.0/ en
dc.subject MEMS en
dc.subject Microsensors en
dc.subject Reliability en
dc.subject Cross-correlation en
dc.subject.lcsh Microelectromechanical systems en
dc.subject.lcsh Wireless sensor networks en
dc.subject.lcsh Telecommunications en
dc.title Development of a microelectromechanical system (MEMS)-based multisensor platform for environmental monitoring en
dc.type Article (peer-reviewed) en
dc.internal.authorurl http://www.tyndall.ie en
dc.internal.authorurl http://publish.ucc.ie/researchprofiles/D006/fpeters en
dc.internal.authorcontactother Mathieu Hautefeuille, Centre for Telecommunication Value-Chain Research, Tyndall National Institute, Lee Maltings, Cork, Ireland. Email: mathieu.hautefeuille@tyndall.ie en
dc.internal.authorcontactother Brendan O'Flynn, Tyndall Microsystems, University College Cork, Cork, Ireland. +353-21-490-3000 Email: brendan.oflynn@tyndall.ie en
dc.internal.authorcontactother Frank Peters, Physics Department, University College Cork, Ireland. Email: F.Peters@ucc.ie en
dc.internal.authorcontactother Conor O'Mahony, Tyndall National Institute, Lee Maltings, Cork, Ireland. Email: conor.omahony@tyndall.ie en
dc.internal.availability Full text available en
dc.date.updated 2012-01-10T17:13:18Z
dc.description.version Published Version en
dc.internal.rssid 119946918
dc.internal.rssid 241769419
dc.contributor.funder Science Foundation Ireland en
dc.description.status Peer reviewed en
dc.identifier.journaltitle Micromachines en
dc.internal.copyrightchecked Yes en
dc.internal.licenseacceptance Yes en
dc.internal.IRISemailaddress mathieu.hautefeuille@tyndall.ie en
dc.internal.IRISemailaddress conor.omahony@tyndall.ie en


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© 2011 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license. Except where otherwise noted, this item's license is described as © 2011 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license.
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