Optical reflectivity of spin-coated multilayered ZnO and Al:ZnO Thin Films

Buckley, Darragh; McCormack, Robert; McNulty, David; Zubialevich, Vitaly Z.; Parbrook, Peter J.; O'Dwyer, Colm

Optical reflectivity of spin-coated multilayered ZnO and Al:ZnO Thin Films

Files

ECST_AZO_draft-f.pdf(1.12 MB)

Accepted version

Date

2017-05

Authors

Buckley, Darragh

McCormack, Robert

McNulty, David

Zubialevich, Vitaly Z.

Parbrook, Peter J.

O'Dwyer, Colm

Publisher

Electrochemical Society

Published Version

10.1149/07706.0075ecst

Abstract

Controlling growth, doping, crystallization, thickness of thin films of thin film transistor (TFT) channel materials is required in order to improve and control physical properties, primarily electronic conductivity and optical transparency. With the advent of flexible electronics and curved TFT-based display panels, low cost, solution-processed methods are important and provide scalable coating methods on a range of substrates. This work demonstrates the changes to the morphology, crystalline structure, optical reflectivity and electrical conductance of solution-processed ZnO thin films by the inclusion of an aluminium dopant during spin-coating. The measurements also determine the compositional chemical state of the Al:ZnO structures compared to ZnO using X-ray photoelectron spectroscopy in conjunction with detailed X-ray diffraction and transmission electron microscopy examination of the film morphology.

Keywords

Thin films , Channel materials , Coating methods , Crystalline structure , Electrical conductance , Electronic conductivity , Optical reflectivity , Optical transparency , Solution-processed , Coatings , Energy gap , Film growth , Film thickness , Films , Flexible displays , Flexible electronics , High resolution transmission electron microscopy , Reflection , Semiconductor devices , Semiconductor doping , Semiconductor materials , Substrates , Thin film transistors , Transmission electron microscopy , Wide band gap semiconductors , X ray diffraction , X ray photoelectron spectroscopy , Zinc oxide

Citation

Buckley, D., McCormack, R., McNulty, D., Zubialevich, V. Z., Parbrook, P. J. and O'Dwyer, C. (2017) 'Optical Reflectivity of Spin-Coated Multilayered ZnO and Al:ZnO Thin Films', ECS Transactions, 77(6), pp. 75-82. doi: 10.1149/07706.0075ecst