Physics-based TCAD analysis of border and interface traps in Al2O3/InGaAs stacks using multifrequency CV-curves

Caruso, Enrico; Lin, Jun; Burke, K. F.; Cherkaoui, Karim; Esseni, David; Gity, Farzan; Monaghan, Scott; Palestri, Pierpaolo; Hurley, Paul K.; Selmi, Luca

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dc.contributor.author	Caruso, Enrico
dc.contributor.author	Lin, Jun
dc.contributor.author	Burke, K. F.
dc.contributor.author	Cherkaoui, Karim
dc.contributor.author	Esseni, David
dc.contributor.author	Gity, Farzan
dc.contributor.author	Monaghan, Scott
dc.contributor.author	Palestri, Pierpaolo
dc.contributor.author	Hurley, Paul K.
dc.contributor.author	Selmi, Luca
dc.date.accessioned	2018-11-30T12:23:22Z
dc.date.available	2018-11-30T12:23:22Z
dc.date.issued	2018-06
dc.identifier.citation	Caruso, E., Lin, J., Burke, K. F.; Cherkaoui, K., Esseni, D.; Gity, F., Monaghan, S., Palestri, P.; Hurley, P. K.; Selmi, L. (2018) ‘Physics-based TCAD analysis of border and interface traps in Al2O3/InGaAs stacks using multifrequency CV-curves’, 20th Workshop on Dielectrics in Microelectronics - WODIM 2018, Berlin, Germany, 10-14 June.	en
dc.identifier.uri	http://hdl.handle.net/10468/7160
dc.description.abstract	In this paper, we analyze the multi-frequency C-V curves of In0.53Ga0.47As MOSCAPs by employing physics-based TCAD simulations including both border and interface traps. The calculations reproduce the experimental inversion and accumulation capacitance, and the general trend of the depletion capacitance. A study of the influence of the quantization model on the extraction of the trap distribution is also carried out.	en
dc.format.mimetype	application/pdf	en
dc.language.iso	en	en
dc.rights	© 2018, the Authors. All rights reserved.	en
dc.subject	TCAD	en
dc.subject	Depletion capacitance	en
dc.subject	Quantization model	en
dc.title	Physics-based TCAD analysis of border and interface traps in Al2O3/InGaAs stacks using multifrequency CV-curves	en
dc.type	Conference item	en
dc.internal.authorcontactother	Enrico Caruso, Tyndall National Institute, University College Cork, Cork, Ireland. T: +353-21-490-3000 E: enrico.caruso@tyndall.ie	en
dc.internal.availability	Full text available	en
dc.description.version	Submitted Version	en
dc.internal.rssid	463811371
dc.description.status	Peer reviewed	en
dc.internal.IRISemailaddress	enrico.caruso@tyndall.ie	en