Dimethylamine borane oxidation for electroless deposition from alkaline solutions

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dc.contributor.author Rohan, James F.
dc.contributor.author Ahern, Bernadette M.
dc.contributor.author Nagle, Lorraine C.
dc.date.accessioned 2019-03-11T15:32:00Z
dc.date.available 2019-03-11T15:32:00Z
dc.date.issued 2006-07
dc.identifier.citation Rohan, J. F., Ahern, B. M. and Nagle, L. C. (2006) 'DMAB Oxidation for Electroless Deposition from Alkaline Solutions', ECS Transactions, 1(31), pp. 1-9. doi: 10.1149/1.2209381 en
dc.identifier.volume 1 en
dc.identifier.issued 31 en
dc.identifier.startpage 1 en
dc.identifier.endpage 9 en
dc.identifier.issn 1938-5862
dc.identifier.uri http://hdl.handle.net/10468/7606
dc.identifier.doi 10.1149/1.2209381
dc.description.abstract Dimethylamine borane (DMAB) has been used as a reducing agent in electroless baths for many years. There has been an increased interest in DMAB-based electroless baths recently for applications in microelectronics such as barrier/capping layers for copper IC interconnect. To optimise the plating baths a thorough understanding of the role of each of the bath constituents is required. To this end we have employed microelectrodes to investigate the oxidation mechanism of boranes in alkaline solutions. In this paper we present data for DMAB and the simpler ammonia borane (AB) to assist in the analysis of borane oxidation in alkaline solutions. Both DMAB and AB are shown to oxidise in two steady state mass transport- controlled oxidation waves for specific concentration ranges. The potential range for oxidation, the optimum concentration and a suggested mechanism for oxidation are shown. en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher Electrochemical Society en
dc.relation.uri http://ecst.ecsdl.org/content/1/31/1
dc.rights © 2006 ECS - The Electrochemical Society en
dc.subject Boron compounds en
dc.subject Electroless plating en
dc.subject Integrated circuits en
dc.subject Mass transportation en
dc.subject Microelectrodes en
dc.subject Microelectronics en
dc.subject Optical interconnects en
dc.subject Oxidation en
dc.subject Alkaline solutions en
dc.subject Ammonia borane (AB) en
dc.subject Borane oxidation en
dc.subject Capping en
dc.subject Plating baths en
dc.title Dimethylamine borane oxidation for electroless deposition from alkaline solutions en
dc.title.alternative DMAB oxidation for electroless deposition from alkaline solutions en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother James Rohan, Tyndall Microsystems, University College Cork, Cork, Ireland. +353-21-490-3000 Email: james.rohan@tyndall.ie en
dc.internal.availability Full text available en
dc.date.updated 2019-03-11T15:28:03Z
dc.description.version Accepted Version en
dc.internal.rssid 477109552
dc.contributor.funder Irish Research Council for Science, Engineering and Technology en
dc.description.status Peer reviewed en
dc.identifier.journaltitle ECS Transactions en
dc.internal.copyrightchecked No !!CORA!! en
dc.internal.licenseacceptance Yes en
dc.internal.conferencelocation Los Angeles, CA., United States en
dc.internal.IRISemailaddress james.rohan@tyndall.ie en

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