Silicon photonic MEMS: exploiting mechanics at the nanoscale to enhance photonic integrated circuits

Thumbnail Image
Quack, Niels
Sattari, Hamed
Takabayashi, Alain Y.
Zhang, Yu
Edinger, Pierre
Errando-Herranz, Carlos
Gylfason, Kristinn B.
Wang, Xiaojing
Niklaus, Frank
Jezzini, Moises A.
Journal Title
Journal ISSN
Volume Title
Optical Society of America
Published Version
Research Projects
Organizational Units
Journal Issue
With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.
Photonic integrated circuits , Power consumption , Silicon photonics , Silicon photonic integrated circuits
Quack, N., Sattari, H., Takabayashi, A. Y., Zhang, Y., Edinger, P., Errando-Herranz, C., Gylfason, K. B., Wang, X., Niklaus, F., Jezzini, M. A., Hwang, H. Y., O’Brien, P., Porcel, M. A. G., Lerma Arce, C., Kumar, S., Abasahl, B., Verheyen, P. and Bogaerts, W. (2019) 'Silicon photonic MEMS: exploiting mechanics at the nanoscale to enhance photonic integrated circuits', Optical Fiber Communications Conference and Exhibition (OFC 2019), San Diego, California, 3-7 March. Available at: (Accessed: 27 May 2019)
© 2019, the Authors. Published by the Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.