The atom pencil: serial writing in the sub-micrometre domain

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dc.contributor.author Mutzel, M.
dc.contributor.author Muller, M.
dc.contributor.author Haubrich, D.
dc.contributor.author Rasbach, U.
dc.contributor.author Meschede, D.
dc.contributor.author O'Dwyer, Colm
dc.contributor.author Gay, G.
dc.contributor.author Viaris de Lesegno, B.
dc.contributor.author Weiner, J.
dc.contributor.author Ludolph, K.
dc.contributor.author Georgiev, G.
dc.contributor.author Oesterschulze, E.
dc.date.accessioned 2013-02-19T16:54:45Z
dc.date.available 2013-02-19T16:54:45Z
dc.date.copyright 2005
dc.date.issued 2005-01
dc.identifier.citation MÜTZEL, M., MÜLLER, M., HAUBRICH, D., RASBACH, U., MESCHEDE, D., O’DWYER, C., GAY, G., LESEGNO, B. V., WEINER, J., LUDOLPH, K., GEORGIEV, G. & OESTERSCHULZE, E. (2005). The atom pencil: serial writing in the sub-micrometre domain. Applied Physics B, 80, 941-944. doi: 10.1007/s00340-005-1863-9 en
dc.identifier.volume 80 en
dc.identifier.issued 8 en
dc.identifier.startpage 941 en
dc.identifier.endpage 944 en
dc.identifier.uri http://hdl.handle.net/10468/976
dc.identifier.doi 10.1007/s00340-005-1863-9
dc.description.abstract The atom pencil we describe here is a versatile tool that writes arbitrary structures by atomic deposition in a serial lithographic process. This device consists of a transversely laser-cooled and collimated cesium atomic beam that passes through a 4-pole atom-flux concentrator and impinges on to micron- and sub-micron-sized apertures. The aperture translates above a fixed substrate and enables the writing of sharp features with sizes down to 280 nm. We have investigated the writing and clogging properties of an atom pencil tip fabricated from silicon oxide pyramids perforated at the tip apex with a sub-micron aperture. en
dc.description.sponsorship European Commission (NANOCOLD project IST-32264-2001) en
dc.description.uri http://nanocold.df.unipi.it/ en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher Springer en
dc.relation.uri http://link.springer.com/article/10.1007%2Fs00340-005-1863-9
dc.rights © Springer-Verlag 2005. The original publication is available at www.springerlink.com en
dc.subject Microscale en
dc.subject Quantum optics en
dc.subject Photoionization and excitation en
dc.subject Atom lithography en
dc.subject Nanometer scale en
dc.subject Atomic nanofabrication en
dc.title The atom pencil: serial writing in the sub-micrometre domain en
dc.type Article (peer-reviewed) en
dc.internal.authorurl http://research.ucc.ie/profiles/D004/codwyer en
dc.internal.authorcontactother Colm O'Dwyer, Chemistry, University College Cork, Cork, Ireland. +353-21-490-3000 Email: c.odwyer@ucc.ie en
dc.internal.availability Full text available en
dc.date.updated 2012-11-30T11:12:47Z
dc.description.version Submitted Version en
dc.internal.rssid 162343153
dc.contributor.funder European Commission en
dc.description.status Peer reviewed en
dc.identifier.journaltitle Applied Physics B-Lasers and Optics en
dc.internal.copyrightchecked No. CORA - en
dc.internal.licenseacceptance Yes en
dc.internal.IRISemailaddress c.odwyer@ucc.ie en


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