Campanella, Humberto; Qian, You; Romero, Christian O.; Giner, Joan; Kumar, Rakesh
(Institute of Electrical and Electronics Engineers (IEEE), 2020-01)
This work is the first demonstration of a monolithic multiband RF front-end module (RF-FEM), integrating MEMS Lamb-wave filters and switches on 200mm RF silicon-on-insulator (RFSOI) foundry technology. Multiple MEMS filters ...