Towards integrated position sensors with nanometer precision

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dc.contributor.authorSchulz, Sebastian A.en
dc.contributor.authorBeck, Paulen
dc.contributor.authorWynne, Laura C.en
dc.contributor.authorIadanza, Simoneen
dc.contributor.authorO'Faolain, Liamen
dc.contributor.authorBanzer, Peteren
dc.contributor.editorLittlejohns, Callum G.en
dc.contributor.editorSorel, Marcen
dc.date.accessioned2025-01-29T10:06:48Z
dc.date.available2025-01-29T10:06:48Z
dc.date.issued2023-01-11en
dc.description.abstractThe ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid1233405en
dc.identifier.citationSchulz, S. A., Beck, P., Wynne, L. C., Iadanza, S., O'Faolain, L. and Banzer, P. (2023) 'Towards integrated position sensors with nanometer precision', Proceedings of SPIE 12334, Emerging Applications in Silicon Photonics III, Birmingham, United Kingdom, 6-8 December 2022, 1233405. https://doi.org/10.1117/12.2644959en
dc.identifier.doihttps://doi.org/10.1117/12.2644959en
dc.identifier.issn0277-786Xen
dc.identifier.journaltitleProceedings of SPIEen
dc.identifier.urihttps://hdl.handle.net/10468/16914
dc.identifier.volume12334en
dc.language.isoenen
dc.publisherSPIEen
dc.relation.ispartofEmerging Applications in Silicon Photonics III, 6-8 December 2022, Birmingham, United Kingdomen
dc.rights© 2023, Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.en
dc.subjectIntegrated position sensorsen
dc.subjectNanometer precisionen
dc.subjectNanoparticlesen
dc.subjectSilicon photonicsen
dc.subjectDirectional scatteringen
dc.subjectSensorsen
dc.subjectIntegrated opticsen
dc.subjectPhotonic integrated circuitsen
dc.titleTowards integrated position sensors with nanometer precisionen
dc.typeConference itemen
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