Co-based amorphous thin films on silicon with soft magnetic properties
Ó Mathúna, S. Cian
The present work investigates the emergence of multiple modes in the high-frequency permeability spectrum of Co-Zr-Ta-B amorphous thin films. Amorphous thin films of different thicknesses (t=100-530 nm) were deposited by DC magnetron sputtering. Their static and dynamic soft magnetic properties were investigated to explore the presence of multi-magnetic phases in the films. A two-phase magnetic behavior of the thicker films (≥333 nm) was revealed by the in-plane hysteresis loops. Multiple resonance peaks were observed in the high-frequency permeability spectrum of the thicker films. The thickness dependent multiple resonance peaks below the main ferromagnetic resonance (FMR) can be attributed to the two-phase magnetic behaviors of the films.
Condensed matter properties , Thin films , Magnetic materials , Ferromagnetic resonance , Physical vapor deposition
Masood, A., McCloskey, P., Mathúna, C. Ó. and Kulkarni, S. (2018) 'Co-based amorphous thin films on silicon with soft magnetic properties', AIP Advances, 8(5), 056109(6pp). doi: 10.1063/1.5007733