High-Q three-dimensional microfabricated magnetic-core toroidal inductors for power supplies in package

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dc.contributor.authorLe, Hoa Thanh
dc.contributor.authorNour, Yasser
dc.contributor.authorPavlovic, Zoran
dc.contributor.authorÓ Mathúna, S. Cian
dc.contributor.authorKnott, Arnold
dc.contributor.authorJensen, Flemming
dc.contributor.authorHan, Anpan
dc.contributor.authorKulkarni, Santosh
dc.contributor.authorOuyang, Ziwei
dc.contributor.funderScience Foundation Irelanden
dc.contributor.funderEnterprise Irelanden
dc.date.accessioned2019-05-21T15:53:00Z
dc.date.available2019-05-21T15:53:00Z
dc.date.issued2018-06-14
dc.date.updated2019-05-09T13:45:31Z
dc.description.abstractThe integration of power inductors is a roadblock in realizing highly miniaturized power supply in package (PSiP) and power supply on chip. Inductors in such power systems are used for energy storage and filtering, but they dominate in size and loss. This paper presents a novel three-dimensional in-silicon through-silicon via (TSV) magnetic-core toroidal inductor for PSiP. The magnetic powder based core is embedded into a TSV air-core inductor using a casting method. The unique air-core inductor design with a hollow core and suspended windings enables a complete core filling with microscale magnetic powders. The proposed casting method is simple, scalable, and generic for a wide range of magnetic powders. TSV magnetic-core inductors are fabricated in a compact size of 2.4 mm × 2.4 mm × 0.28 mm with the core content varying from 63 to 88 wt% of soft ferrite NiZn powders. The TSV magnetic-core toroidal inductors are fabricated and electrically characterized. Small-signal measurements show a threefold higher inductance of 112 nH and a 30% higher quality factor of 14.3 at 12.5 MHz for magnetic-core inductors compared with similar TSV air-core inductors. The small-signal measurement results are verified by the modeled results. The total core loss is characterized by large-signal measurements. A suitable inductor is implemented in a 12-MHz buck converter that operates in a zero-voltage-switching mode. The converter achieves a peak efficiency of 71.6% and an output power of 2.4 W while converting 12 to 5 V dc .en
dc.description.sponsorshipEnterprise Ireland (TinyPower project, funded by the Innovation Fund under Grant 67-2014-1)en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationLe, H. T., Nour, Y., Pavlovic, Z., Mathúna, C. O., Knott, A., Jensen, F., Han, A., Kulkarni, S. and Ouyang, Z. (2019) 'High-QThree-Dimensional Microfabricated Magnetic-Core Toroidal Inductors for Power Supplies in Package', IEEE Transactions on Power Electronics, 34(1), pp. 74-85. doi: 10.1109/TPEL.2018.2847439en
dc.identifier.doi10.1109/TPEL.2018.2847439en
dc.identifier.eissn1941-0107
dc.identifier.endpage85en
dc.identifier.issn0885-8993
dc.identifier.issued1en
dc.identifier.journaltitleIEEE Transactions on Power Electronicsen
dc.identifier.startpage74en
dc.identifier.urihttps://hdl.handle.net/10468/7956
dc.identifier.volume34en
dc.language.isoenen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.projectinfo:eu-repo/grantAgreement/SFI/SFI Starting Investigator Research Grant (SIRG)/15/SIRG/3569/IE/Advanced Power Magnetics Programme for High Efficiency Power Supplies/en
dc.relation.projectinfo:eu-repo/grantAgreement/SFI/SFI Investigator Programme/15/IA/3180/IE/Advanced Integrated Power Magnetics Technology- From Atoms to Systems/en
dc.relation.urihttps://ieeexplore.ieee.org/document/8385217
dc.rights© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.en
dc.subjectInductoren
dc.subjectMagnetic materialsen
dc.subjectMicrofabricationen
dc.subjectPower supply in package (PSiP)en
dc.subjectThrough-silicon via (TSV)en
dc.subjectInductorsen
dc.subjectMagnetic coresen
dc.subjectThrough-silicon viasen
dc.subjectToroidal magnetic fieldsen
dc.subjectPowders Soft magnetic materialsen
dc.subjectSoft magnetic materialsen
dc.subjectWindingsen
dc.titleHigh-Q three-dimensional microfabricated magnetic-core toroidal inductors for power supplies in packageen
dc.typeArticle (peer-reviewed)en
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