Electrical characterisation of InGaAs on insulator structures
dc.contributor.author | Cherkaoui, Karim | |
dc.contributor.author | Gomeniuk, Y. Y. | |
dc.contributor.author | Daix, N. | |
dc.contributor.author | O'Brien, J. | |
dc.contributor.author | Blake, A. | |
dc.contributor.author | Thomas, K. K. | |
dc.contributor.author | Pelucchi, Emanuele | |
dc.contributor.author | O'Connell, D. | |
dc.contributor.author | Sheehan, Brendan | |
dc.contributor.author | Monaghan, Scott | |
dc.contributor.author | Caimi, D. | |
dc.contributor.author | Czornomaz, L. | |
dc.contributor.author | Uccelli, E. | |
dc.contributor.author | Hurley, Paul K. | |
dc.contributor.funder | Seventh Framework Programme | en |
dc.contributor.funder | Science Foundation Ireland | en |
dc.date.accessioned | 2022-06-28T11:44:17Z | |
dc.date.available | 2022-06-28T11:44:17Z | |
dc.date.issued | 2015-04-16 | |
dc.date.updated | 2022-06-27T10:45:21Z | |
dc.description.abstract | The electrical properties of Au/Ni/In0.53Ga0.47As/Al2O3/SiO2/Si structures were investigated using capacitance voltage (C–V) analysis. The properties of the InGaAs on insulator structures were analysed by comparing the measured and the theoretical C–Vs obtained using a physics based simulation of this structure. The results show that the measured data obtained on both n-type and p-type silicon match very well the simulated data. This work also shows that this approach allows the characterisation of charges in the buried oxide as well as interface states at the bottom InGaAs/Al2O3 interface. | en |
dc.description.sponsorship | Science Foundation Ireland (SFI/09/IN.1/I2633) | en |
dc.description.status | Peer reviewed | en |
dc.description.version | Accepted Version | en |
dc.format.mimetype | application/pdf | en |
dc.identifier.citation | Cherkaoui, K., Gomeniuk, Y. Y., Daix, N., O’Brien, J., Blake, A., Thomas, K. K., Pelucchi, E., O’Connell, D., Sheehan, B., Monaghan, S., Caimi, D., Czornomaz, L., Uccelli, E. and Hurley, Paul K. (2015) 'Electrical characterisation of InGaAs on insulator structures', Microelectronic Engineering, 147, pp. 63-66. doi: 10.1016/j.mee.2015.04.077 | en |
dc.identifier.doi | 10.1016/j.mee.2015.04.077 | en |
dc.identifier.endpage | 66 | en |
dc.identifier.issn | 0167-9317 | |
dc.identifier.journaltitle | Microelectronic Engineering | en |
dc.identifier.startpage | 63 | en |
dc.identifier.uri | https://hdl.handle.net/10468/13322 | |
dc.identifier.volume | 147 | en |
dc.language.iso | en | en |
dc.publisher | Elsevier B.V. | en |
dc.relation.project | info:eu-repo/grantAgreement/EC/FP7::SP1::ICT/619325/EU/Compound Semiconductors for 3D integration/COMPOSE3 | en |
dc.relation.project | info:eu-repo/grantAgreement/SFI/SFI Principal Investigator Programme (PI)/09/IN.1/I2633/IE/Investigating Emerging Non-Silicon Transistors (INVENT)/ | en |
dc.rights | © 2015, Elsevier B.V. All rights reserved. This manuscript version is made available under the CC BY-NC-ND 4.0 license. | en |
dc.rights.uri | https://creativecommons.org/licenses/by-nc-nd/4.0/ | en |
dc.subject | InGaAs | en |
dc.subject | 3D integration | en |
dc.subject | Interlayer dielectric | en |
dc.title | Electrical characterisation of InGaAs on insulator structures | en |
dc.type | Article (peer-reviewed) | en |