Dimethylamine borane oxidation for electroless deposition from alkaline solutions

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dc.contributor.authorRohan, James F.
dc.contributor.authorAhern, Bernadette M.
dc.contributor.authorNagle, Lorraine C.
dc.contributor.funderIrish Research Council for Science, Engineering and Technologyen
dc.date.accessioned2019-03-11T15:32:00Z
dc.date.available2019-03-11T15:32:00Z
dc.date.issued2006-07
dc.date.updated2019-03-11T15:28:03Z
dc.description.abstractDimethylamine borane (DMAB) has been used as a reducing agent in electroless baths for many years. There has been an increased interest in DMAB-based electroless baths recently for applications in microelectronics such as barrier/capping layers for copper IC interconnect. To optimise the plating baths a thorough understanding of the role of each of the bath constituents is required. To this end we have employed microelectrodes to investigate the oxidation mechanism of boranes in alkaline solutions. In this paper we present data for DMAB and the simpler ammonia borane (AB) to assist in the analysis of borane oxidation in alkaline solutions. Both DMAB and AB are shown to oxidise in two steady state mass transport- controlled oxidation waves for specific concentration ranges. The potential range for oxidation, the optimum concentration and a suggested mechanism for oxidation are shown.en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationRohan, J. F., Ahern, B. M. and Nagle, L. C. (2006) 'DMAB Oxidation for Electroless Deposition from Alkaline Solutions', ECS Transactions, 1(31), pp. 1-9. doi: 10.1149/1.2209381en
dc.identifier.doi10.1149/1.2209381
dc.identifier.endpage9en
dc.identifier.issn1938-5862
dc.identifier.issued31en
dc.identifier.journaltitleECS Transactionsen
dc.identifier.startpage1en
dc.identifier.urihttps://hdl.handle.net/10468/7606
dc.identifier.volume1en
dc.language.isoenen
dc.publisherElectrochemical Societyen
dc.relation.urihttp://ecst.ecsdl.org/content/1/31/1
dc.rights© 2006 ECS - The Electrochemical Societyen
dc.subjectBoron compoundsen
dc.subjectElectroless platingen
dc.subjectIntegrated circuitsen
dc.subjectMass transportationen
dc.subjectMicroelectrodesen
dc.subjectMicroelectronicsen
dc.subjectOptical interconnectsen
dc.subjectOxidationen
dc.subjectAlkaline solutionsen
dc.subjectAmmonia borane (AB)en
dc.subjectBorane oxidationen
dc.subjectCappingen
dc.subjectPlating bathsen
dc.titleDimethylamine borane oxidation for electroless deposition from alkaline solutionsen
dc.title.alternativeDMAB oxidation for electroless deposition from alkaline solutionsen
dc.typeArticle (peer-reviewed)en
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