Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics

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dc.contributor.authorSaura, X.
dc.contributor.authorSuñé, Jordi
dc.contributor.authorMonaghan, Scott
dc.contributor.authorHurley, Paul K.
dc.contributor.authorMiranda, E.
dc.contributor.funderDepartament d'Universitats, Recerca i Societat de la Informació
dc.contributor.funderMinisterio de Ciencia y Tecnología
dc.date.accessioned2017-09-20T10:06:32Z
dc.date.available2017-09-20T10:06:32Z
dc.date.issued2013
dc.description.abstractThe breakdown spot spatial distribution in Pt/HfO2/Pt capacitors is investigated using nearest neighbor statistics in combination with more conventional estimation methods such as the point-event and event-event distance distributions. The spots appear as a random point pattern over the top metal electrode and arise as a consequence of significant localized thermal effects caused by the application of high-voltage ramped stress to the devices. The reported study mainly involves the statistical characterization of the distances between each failure site and the nearest, second nearest,... kth nearest event and the comparison with the corresponding theoretical distributions for a complete spatial randomness (CSR) process. A method for detecting and correcting deviations from CSR based on a precise estimation of the average point intensity and the effective damaged device area is proposed. (C) 2013 AIP Publishing LLC.en
dc.description.sponsorshipMinisterio de Ciencia y Tecnología [TEC2012-32305]; Departament d'Universitats, Recerca i Societat de la Informació [2009SGR783]en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid154112
dc.identifier.citationSaura, X., Suñé, J., Monaghan, S., Hurley, P. K. and Miranda, E. (2013) 'Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics', Journal of Applied Physics, 114(15), 154112 (9pp). doi: 10.1063/1.4825321en
dc.identifier.doi10.1063/1.4825321
dc.identifier.endpage9
dc.identifier.issn0021-8979
dc.identifier.issn1089-7550
dc.identifier.issued15
dc.identifier.journaltitleJournal of Applied Physicsen
dc.identifier.startpage1
dc.identifier.urihttps://hdl.handle.net/10468/4722
dc.identifier.volume114
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.urihttp://aip.scitation.org/doi/10.1063/1.4825321
dc.rights© 2013, AIP Publishing LLC. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Saura, X., Suñé, J., Monaghan, S., Hurley, P. K. and Miranda, E. (2013) 'Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics', Journal of Applied Physics, 114(15), 154112 (9pp). doi: 10.1063/1.4825321 and may be found at http://aip.scitation.org/doi/10.1063/1.4825321en
dc.subjectSpatial analysisen
dc.subjectCapacitorsen
dc.subjectCumulative distribution functionsen
dc.subjectStructural failureen
dc.subjectElectrodesen
dc.titleAnalysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statisticsen
dc.typeArticle (peer-reviewed)en
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