Fabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodes

dc.contributor.authorMcSweeney, William
dc.contributor.authorLotty, Olan
dc.contributor.authorHolmes, Justin D.
dc.contributor.authorO'Dwyer, Colm
dc.contributor.funderHigher Education Authorityen
dc.contributor.funderSeventh Framework Programmeen
dc.date.accessioned2018-06-13T14:33:25Z
dc.date.available2018-06-13T14:33:25Z
dc.date.issued2011
dc.date.updated2018-06-11T21:41:47Z
dc.description.abstractSilicon nanowires were fabricated by a metal assisted chemical (MAC) etching process and routes toward ohmic contacting of substrates for Li-ion battery anode application were developed. Si nanowire layers are comprised of wires that are single crystal with rough outer surfaces. The nanowires are epitaxial with the underlying Si(100) substrate, maintain equivalent doping density and crystal orientation, and are coated with a stoichiometric SiO2. Electrical backside contacting using an In-Ga eutectic allows low-resistance ohmic contacts to low-doped nanowire electrodes for electrochemical testing.en
dc.description.sponsorshipHigher Education Authority (under the framework of the INSPIRE programme, funded by the Irish Government's Programme for Research in Third Level Institutions, Cycle 4, National Development Plan 2007-2013)en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationMcSweeney, W., Lotty, O., Holmes, J. D. and O'Dwyer, C. (2011) 'Fabrication and Characterization of Single-Crystal Metal-Assisted Chemically Etched Rough Si Nanowires for Lithium-Ion Battery Anodes', ECS Transactions, 35(34), pp. 25-34. doi: 10.1149/1.3654199en
dc.identifier.doi10.1149/1.3654199
dc.identifier.issn1938-5862
dc.identifier.journaltitleElectrochemical Society Transactionsen
dc.identifier.startpage25en
dc.identifier.urihttps://hdl.handle.net/10468/6295
dc.identifier.volume35en
dc.language.isoenen
dc.publisherElectrochemical Societyen
dc.relation.projectinfo:eu-repo/grantAgreement/EC/FP7::SP1::ICT/257856/EU/Semiconducting Nanowire Platform for Autonomous Sensors/SINAPSen
dc.rights© 2011 ECS - The Electrochemical Societyen
dc.subjectNanowiresen
dc.subjectElectrochemical cellsen
dc.subjectElectrodesen
dc.subjectEnergy storageen
dc.subjectNanostructured materialsen
dc.subjectOhmic contactsen
dc.subjectSiliconen
dc.subjectSilicon oxidesen
dc.subjectSilicon wafersen
dc.subjectSubstratesen
dc.subjectDoping densitiesen
dc.subjectElectrochemical testingen
dc.subjectEtching processen
dc.subjectLi-ion batteriesen
dc.subjectLithium-ion batteryen
dc.subjectLow resistanceen
dc.subjectOuter surfaceSi (100) substrateen
dc.subjectSi nanowireen
dc.subjectSilicon nanowiresen
dc.titleFabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodesen
dc.typeArticle (peer-reviewed)en
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