Comment on "Comparison of air breakdown and substrate injection as mechanisms to induce dielectric charging in microelectromechanical switches" [Appl. Phys. Lett. 92, 043502 (2008)]

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dc.contributor.authorOlszewski, Oskar Zbigniew
dc.contributor.authorO'Mahony, Conor
dc.contributor.authorHoulihan, Ruth
dc.contributor.authorDuane, Russell
dc.date.accessioned2017-07-28T11:22:10Z
dc.date.available2017-07-28T11:22:10Z
dc.date.issued2009
dc.description.abstractThe purpose of this comment is to provide additional insight into the reliability of microelectromechanical capacitive switches (MEMSs) investigated by Molinero and Casta er [Appl. Phys. Lett. 92, 043502 (2008)]. We show that the presence or absence of ambient humidity determines whether the shift in the capacitance-voltage (C-V) curve of oxide-based MEMS occurs as a result of voltage stress. In humid air, negative and positive shifts in the C-V curve are observed after negative and positive bias stress. In dry air no such shifts in the C-V curve are seen. These shifts are similar to those reported on oxide-based switches by Molinero and Castaner [Appl. Phys. Lett. 92, 043502 (2008)] where they show shifts occurring in room ambient pressure, but not in vacuum. This indicates that not only air pressure but also air humidity can be responsible for shifts in MEMS. (C) 2009 American Institute of Physics. (doi: 10.1063/1.3255008)en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid176101
dc.identifier.citationOlszewski, Z., O’Mahony, C., Houlihan, R. and Duane, R. (2009) 'Comment on “Comparison of air breakdown and substrate injection as mechanisms to induce dielectric charging in microelectromechanical switches” [Appl. Phys. Lett. 92, 043502 (2008)]', Applied Physics Letters, 95(17), pp. 176101.en
dc.identifier.doi10.1063/1.3255008
dc.identifier.endpage3
dc.identifier.issn0003-6951
dc.identifier.issn1077-3118
dc.identifier.issued17
dc.identifier.journaltitleApplied Physics Lettersen
dc.identifier.startpage1
dc.identifier.urihttps://hdl.handle.net/10468/4351
dc.identifier.volume95
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.urihttp://aip.scitation.org/doi/abs/10.1063/1.3255008
dc.rights© 2009 American Institute of Physics.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Olszewski, Z., O’Mahony, C., Houlihan, R. and Duane, R. (2009) 'Comment on “Comparison of air breakdown and substrate injection as mechanisms to induce dielectric charging in microelectromechanical switches” [Appl. Phys. Lett. 92, 043502 (2008)]', Applied Physics Letters, 95(17), pp. 176101 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.3255008en
dc.subjectWateren
dc.subjectMicroelectromechanical systemsen
dc.subjectDielectricsen
dc.subjectOxide surfacesen
dc.subjectCharge injectionen
dc.subjectElectric measurementsen
dc.titleComment on "Comparison of air breakdown and substrate injection as mechanisms to induce dielectric charging in microelectromechanical switches" [Appl. Phys. Lett. 92, 043502 (2008)]en
dc.typeArticle (peer-reviewed)en
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