The structural and piezoresponse properties of c-axis-oriented Aurivillius phase Bi5Ti3FeO15 thin films deposited by atomic vapor deposition

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dc.contributor.authorZhang, Panfeng F.
dc.contributor.authorDeepak, Nitin
dc.contributor.authorKeeney, Lynette
dc.contributor.authorPemble, Martyn E.
dc.contributor.authorWhatmore, Roger W.
dc.contributor.funderHigher Education Authorityen
dc.contributor.funderScience Foundation Irelanden
dc.date.accessioned2016-07-22T15:24:17Z
dc.date.available2016-07-22T15:24:17Z
dc.date.issued2012-09-11
dc.date.updated2014-09-03T10:33:14Z
dc.description.abstractThe deposition by atomic vapor deposition of highly c-axis-oriented Aurivillius phase Bi 5Ti 3FeO 15 (BTFO) thin films on (100) Si substrates is reported. Partially crystallized BTFO films with c-axis perpendicular to the substrate surface were first deposited at 610°C (8 excess Bi), and subsequently annealed at 820°C to get stoichiometric composition. After annealing, the films were highly c-axis-oriented, showing only (00l) peaks in x-ray diffraction (XRD), up to (0024). Transmission electron microscopy (TEM) confirms the BTFO film has a clear layered structure, and the bismuth oxide layer interleaves the four-block pseudoperovskite layer, indicating the n 4 Aurivillius phase structure. Piezoresponse force microscopy measurements indicate strong in-plane piezoelectric response, consistent with the c-axis layered structure, shown by XRD and TEM.en
dc.description.sponsorshipScience Foundation Ireland (SFI FORME Strategic Research Cluster Award number 07/SRC/I1172); Higher Education Authority (HEA PRTLI 3 funding, and HEA PRTLI4Project INSPIRE.)en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid112903
dc.identifier.citationZhang, P. F., Deepak, N., Keeney, L., Pemble, M. E. and Whatmore, R. W. (2012) 'The structural and piezoresponse properties of c-axis-oriented Aurivillius phase Bi5Ti3FeO15 thin films deposited by atomic vapor deposition'. Applied Physics Letters, 101, 112903. http://scitation.aip.org/content/aip/journal/apl/101/11/10.1063/1.4752007en
dc.identifier.doi10.1063/1.4752007
dc.identifier.endpage112903-4en
dc.identifier.issn0003-6951
dc.identifier.issn1077-3118
dc.identifier.journaltitleApplied Physics Lettersen
dc.identifier.startpage112903-1en
dc.identifier.urihttps://hdl.handle.net/10468/2933
dc.identifier.volume101en
dc.language.isoenen
dc.publisherAIP Publishingen
dc.rights© 2012 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Appl. Phys. Lett. 101, 112903 (2012) and may be found at http://scitation.aip.org/content/aip/journal/apl/101/11/10.1063/1.4752007en
dc.subjectThin film structureen
dc.subjectThin filmsen
dc.subjectAnnealingen
dc.subjectLiquid thin filmsen
dc.subjectX-ray diffractionen
dc.subjectBi 5Ti 3FeO 15en
dc.subjectBismuth titanateen
dc.subjectTransmission electron microscopyen
dc.subjectAtomic vapor depositionen
dc.titleThe structural and piezoresponse properties of c-axis-oriented Aurivillius phase Bi5Ti3FeO15 thin films deposited by atomic vapor depositionen
dc.typeArticle (peer-reviewed)en
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