Anisotropic Ni–Fe–B films with varying alloy composition for high frequency magnetics on silicon applications

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dc.check.date2017-09-03
dc.check.infoAccess to this article is restricted until 24 months after publication by the request of the publisher.en
dc.contributor.authorAnthony, Ricky
dc.contributor.authorShanahan, Brian J.
dc.contributor.authorWaldron, Finbarr
dc.contributor.authorÓ Mathúna, S. Cian
dc.contributor.authorRohan, James F.
dc.contributor.funderEuropean Commissionen
dc.contributor.funderSeventh Framework Programmeen
dc.contributor.funderScience Foundation Irelanden
dc.contributor.funderTyndall National Institute, Irelanden
dc.date.accessioned2017-03-01T10:01:45Z
dc.date.available2017-03-01T10:01:45Z
dc.date.issued2015-09-03
dc.date.updated2017-03-01T09:46:04Z
dc.description.abstractAn electroless nickel-iron alloy deposition process utilizing an external magnetic field was studied to achieve varying nickel and iron compositions for the specific high frequency application range. High anisotropy, low coercivity and high saturation flux density values were achieved which show significant improvements appropriate for high frequency magnetics on silicon applications. It has been shown that higher Fe content films can be achieved by increasing the DMAB concentration. The magnetic, electrical and structural characteristics of these application specific films with different Fe content were reported. The increased resistivity of the films reduces the eddy current losses whereas the permeability studies suggests high frequency applicability of the thin films as core material in magnetics on Si applications. The micro-structural analyses suggested that the deposits are nano-crystalline in nature with grain sizes below 33 nm resulting in low coercivity values in the films. The pH value is compatible with standard photoresists used in silicon based microfabrication processes.en
dc.description.sponsorshipTyndall National Institute (Central Fabrication Facilities)en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationAnthony, R., Shanahan, B. J., Waldron, F., Ó Mathúna, C. and Rohan, J. F. (2015) 'Anisotropic Ni–Fe–B films with varying alloy composition for high frequency magnetics on silicon applications', Applied Surface Science, 357, Part A, pp. 385-390. doi:10.1016/j.apsusc.2015.09.025en
dc.identifier.doi10.1016/j.apsusc.2015.09.025
dc.identifier.endpage390en
dc.identifier.issn0169-4332
dc.identifier.journaltitleApplied Surface Scienceen
dc.identifier.startpage385en
dc.identifier.urihttps://hdl.handle.net/10468/3712
dc.identifier.volume357 Part Aen
dc.language.isoenen
dc.publisherElsevieren
dc.relation.projectinfo:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318529/EU/POWER SoC With Integrated PassivEs/POWERSWIPEen
dc.relation.projectinfo:eu-repo/grantAgreement/SFI/SFI Technology and Innovation Development Award (TIDA)/12/TIDA/I2355/IE/Probing the limits of ultrathin solution based meral and alloy deposition/
dc.rights© 2015 Elsevier B.V. This manuscript version is made available under the CC-BY-NC-ND 4.0 licenseen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/en
dc.subjectElectroless depositionen
dc.subjectHigh frequency magneticsen
dc.subjectSilicon integrationen
dc.subjectAnisotropyen
dc.subjectCoercivityen
dc.subjectResistivityen
dc.subjectNi-Fe alloysen
dc.titleAnisotropic Ni–Fe–B films with varying alloy composition for high frequency magnetics on silicon applicationsen
dc.typeArticle (peer-reviewed)en
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