Surface morphology evolution of AlGaN microhoneycomb structures during epitaxial overgrowth

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dc.check.date2025-01-07
dc.check.infoAccess to this article is restricted until 12 months after publication by request of the publisher
dc.contributor.authorSingh, Sandeep M.
dc.contributor.authorZubialevich, Vitaly Z.
dc.contributor.authorParbrook, Peter J.
dc.contributor.funderScience Foundation Ireland
dc.date.accessioned2024-01-19T14:23:27Z
dc.date.available2024-01-18T13:30:54Zen
dc.date.available2024-01-19T14:23:27Z
dc.date.issued2024-01-07
dc.date.updated2024-01-18T13:31:00Zen
dc.description.abstractThe surface morphological development during epitaxial overgrowth of AlGaN on microhoneycomb (μ-HC) patterned relaxed AlGaN/AlN/sapphire templates is studied. Optimization of μ-pattern design and influence of various growth parameters are carried out in search for conditions resulting in coalescence of μ-HC structures into planar layers or ordered arrays of V-pits with well-defined crystallographic facets. It is found that in a wide range of growth conditions, formation of V-pits with semipolar facets occurs where their crystallographic orientation is defined by the geometry of the initial μ-HC patterns and growth conditions. High-temperature and high V/III ratio conditions are found to favor c-plane expansion and allow recovery of planarity on the patterned templates. Systematic study of surface morphology evolution in conditions favoring 1) semipolar facets formation and 2) coalescence is carried out and possible mechanisms underpinning the observed behaviors have been proposed.
dc.description.statusPeer revieweden
dc.description.versionAccepted Version
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid2300471
dc.identifier.citationSingh, S. M., Zubialevich, V. Z. and Parbrook, P. J. (2024) 'Surface morphology evolution of AlGaN microhoneycomb structures during epitaxial overgrowth', physica status solidi (b) – basic solid state physics, 2300471 (13pp). https://doi.org/10.1002/pssb.202300471
dc.identifier.doihttps://doi.org/10.1002/pssb.202300471
dc.identifier.eissn1521-3951
dc.identifier.endpage13
dc.identifier.issn0370-1972
dc.identifier.startpage1
dc.identifier.urihttps://hdl.handle.net/10468/15410
dc.language.isoenen
dc.publisherJohn Wiley & Sons, Inc.
dc.relation.projectinfo:eu-repo/grantAgreement/SFI/SFI Research Centres Programme::Phase 2/12/RC/2276_P2/IE/IPIC_Phase 2/
dc.rights© 2023 Wiley-VCH GmbH. This is the accepted version of the following item: Singh, S. M., Zubialevich, V. Z. and Parbrook, P. J. (2024) 'Surface morphology evolution of AlGaN microhoneycomb structures during epitaxial overgrowth', physica status solidi (b) – basic solid state physics, 2300471 (13pp), which has been published in final form at: https://doi.org/10.1002/pssb.202300471 This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions.
dc.subjectSurface morphological development
dc.subjectEpitaxial overgrowth of AlGaN on microhoneycomb (μ-HC) patterned relaxed AlGaN/AlN/sapphire templates
dc.titleSurface morphology evolution of AlGaN microhoneycomb structures during epitaxial overgrowth
dc.typeArticle (peer-reviewed)
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