Enhanced soft magnetic properties in N-doped amorphous FeCo thin film

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Date
2023-06-26
Authors
Das, Rajasree
Wei, Guan-Nan
Lordan, Daniel
Hayes, Mike
Clarke, Barry
Hurley, David
Ó Mathúna, Cian
Sai, Ranajit
McCloskey, Paul
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Institute of Electrical and Electronics Engineers (IEEE)
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Abstract
Sputtered FeCoN x thin films with various nitrogen fraction are investigated in the quest of low lossy, soft magnetic thin films (SMFs) for high frequency inductor core. 100-nm thick FeCoN x films were deposited in N 2 +Ar environment (5 mTorr) with increasing N 2 volume percent, x % = N 2 /(Ar + N 2 ), up to 30%. While FeCo thin film is isotropic, incorporation of nitrogen in the film exhibits a well-defined uniaxial magnetic anisotropy (UMA) as a result of reduced stress in the FeCoN x films. FeCoN 17.5 thin film with UMA shows superior all-round soft magnetic properties (saturation flux density ~ 1.7 T, coercivity ~ 7.8 Oe, real permeability ~ 381.7 and resistivity ~ 201 μΩ.cm). Study of the dynamic magnetic properties of FeCoN x ( x = 15, 17.5 and 19%) films reveal two ferromagnetic resonance (FMR) peaks. Double resonance peaks in films with high concentration of nitrogen might be related to FeCo and Fe-N multiphase in the films. Furthermore, evolution of the real (μʹ) and imaginary (μʺ) part of the permeability spectra in the presence of dc magnetic bias field is also examined.
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Keywords
Soft magnetic thin films , Magnetic anisotropy , FeCo magnetic materials , Permeability , Saturation flux density
Citation
Das, R., Wei, G.-N., Lordan, D., Hayes, M., Clarke, B., Hurley, D., Ó Mathúna, C., Sai, R. and McCloskey, P. (2023) 'Enhanced soft magnetic properties in N-doped amorphous FeCo thin film', IEEE Transactions on Magnetics, 59(11), 2001305 (5pp). doi: 10.1109/TMAG.2023.3287682
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