Enhanced soft magnetic properties in N-doped amorphous FeCo thin film

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Das, Rajasree
Wei, Guan-Nan
Lordan, Daniel
Hayes, Mike
Clarke, Barry
Hurley, David
Ó Mathúna, Cian
Sai, Ranajit
McCloskey, Paul
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Sputtered FeCoN x thin films with various nitrogen fraction are investigated in the quest of low lossy, soft magnetic thin films (SMFs) for high frequency inductor core. 100-nm thick FeCoN x films were deposited in N 2 +Ar environment (5 mTorr) with increasing N 2 volume percent, x % = N 2 /(Ar + N 2 ), up to 30%. While FeCo thin film is isotropic, incorporation of nitrogen in the film exhibits a well-defined uniaxial magnetic anisotropy (UMA) as a result of reduced stress in the FeCoN x films. FeCoN 17.5 thin film with UMA shows superior all-round soft magnetic properties (saturation flux density ~ 1.7 T, coercivity ~ 7.8 Oe, real permeability ~ 381.7 and resistivity ~ 201 μΩ.cm). Study of the dynamic magnetic properties of FeCoN x ( x = 15, 17.5 and 19%) films reveal two ferromagnetic resonance (FMR) peaks. Double resonance peaks in films with high concentration of nitrogen might be related to FeCo and Fe-N multiphase in the films. Furthermore, evolution of the real (μʹ) and imaginary (μʺ) part of the permeability spectra in the presence of dc magnetic bias field is also examined.
Soft magnetic thin films , Magnetic anisotropy , FeCo magnetic materials , Permeability , Saturation flux density
Das, R., Wei, G.-N., Lordan, D., Hayes, M., Clarke, B., Hurley, D., Ó Mathúna, C., Sai, R. and McCloskey, P. (2023) 'Enhanced soft magnetic properties in N-doped amorphous FeCo thin film', IEEE Transactions on Magnetics, 59(11), 2001305 (5pp). doi: 10.1109/TMAG.2023.3287682
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