The atom pencil: serial writing in the sub-micrometre domain

dc.contributor.authorMutzel, M.
dc.contributor.authorMuller, M.
dc.contributor.authorHaubrich, D.
dc.contributor.authorRasbach, U.
dc.contributor.authorMeschede, D.
dc.contributor.authorO'Dwyer, Colm
dc.contributor.authorGay, G.
dc.contributor.authorViaris de Lesegno, B.
dc.contributor.authorWeiner, J.
dc.contributor.authorLudolph, K.
dc.contributor.authorGeorgiev, G.
dc.contributor.authorOesterschulze, E.
dc.contributor.funderEuropean Commissionen
dc.date.accessioned2013-02-19T16:54:45Z
dc.date.available2013-02-19T16:54:45Z
dc.date.copyright2005
dc.date.issued2005-01
dc.date.updated2012-11-30T11:12:47Z
dc.description.abstractThe atom pencil we describe here is a versatile tool that writes arbitrary structures by atomic deposition in a serial lithographic process. This device consists of a transversely laser-cooled and collimated cesium atomic beam that passes through a 4-pole atom-flux concentrator and impinges on to micron- and sub-micron-sized apertures. The aperture translates above a fixed substrate and enables the writing of sharp features with sizes down to 280 nm. We have investigated the writing and clogging properties of an atom pencil tip fabricated from silicon oxide pyramids perforated at the tip apex with a sub-micron aperture.en
dc.description.sponsorshipEuropean Commission (NANOCOLD project IST-32264-2001)en
dc.description.statusPeer revieweden
dc.description.urihttp://nanocold.df.unipi.it/en
dc.description.versionSubmitted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationMÜTZEL, M., MÜLLER, M., HAUBRICH, D., RASBACH, U., MESCHEDE, D., O’DWYER, C., GAY, G., LESEGNO, B. V., WEINER, J., LUDOLPH, K., GEORGIEV, G. & OESTERSCHULZE, E. (2005). The atom pencil: serial writing in the sub-micrometre domain. Applied Physics B, 80, 941-944. doi: 10.1007/s00340-005-1863-9en
dc.identifier.doi10.1007/s00340-005-1863-9
dc.identifier.endpage944en
dc.identifier.issued8en
dc.identifier.journaltitleApplied Physics B-Lasers and Opticsen
dc.identifier.startpage941en
dc.identifier.urihttps://hdl.handle.net/10468/976
dc.identifier.volume80en
dc.language.isoenen
dc.publisherSpringeren
dc.relation.urihttp://link.springer.com/article/10.1007%2Fs00340-005-1863-9
dc.rights© Springer-Verlag 2005. The original publication is available at www.springerlink.comen
dc.subjectMicroscaleen
dc.subjectQuantum opticsen
dc.subjectPhotoionization and excitationen
dc.subjectAtom lithographyen
dc.subjectNanometer scaleen
dc.subjectAtomic nanofabricationen
dc.titleThe atom pencil: serial writing in the sub-micrometre domainen
dc.typeArticle (peer-reviewed)en
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