MEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substrates

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dc.check.date2017-12-29
dc.check.infoAccess to this item is restricted until 24 months after publication by the request of the publisher.en
dc.contributor.authorAnthony, Ricky
dc.contributor.authorWang, Ningning
dc.contributor.authorCasey, Declan P.
dc.contributor.authorÓ Mathúna, S. Cian
dc.contributor.authorRohan, James F.
dc.contributor.funderEuropean Commissionen
dc.contributor.funderSeventh Framework Programmeen
dc.date.accessioned2017-03-01T12:13:41Z
dc.date.available2017-03-01T12:13:41Z
dc.date.issued2015-12-29
dc.date.updated2017-03-01T12:03:28Z
dc.description.abstractA surface micro-machining process is described to realize planar inductors on ferrite (Ni0.49Zn0.33Cu0.18 Fe2O4) for high-frequency applications (<30 MHz). The highly resistive nature (~108 Ω m) of the Ni–Cu–Zn substrate allows direct conductor patterning by electroplating of Cu windings through a photoresist mold on a sputtered seed layer and eliminates the need for a dielectric layer to isolate the windings from the bottom magnetic core. Measured inductances~367 nH (DC resistance~1.16 Ω and Q-value>14 at 30 MHz) and ~244 nH (DC resistance~0.86 Ω and Q-value~18 at 30 MHz) at 1 MHz for elongated racetrack (10.75 nH/mm2) and racetrack inductors (12.5 nH/mm2), respectively show good agreement with simulated finite element method analysis. This device can be integrated with power management ICs PMICs for cost-effective, high-performance realization of power-supply in package (PSiP) or on-chip (PSoC). This simple process lays the foundation for fabricating closed core ferrite nano-crystalline core micro-inductors.en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationAnthony, R., Wang, N., Casey, D. P., Ó Mathúna, C. and Rohan, J. F. (2016) 'MEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substrates', Journal of Magnetism and Magnetic Materials, 406, pp. 89-94. doi:10.1016/j.jmmm.2015.12.099en
dc.identifier.doi10.1016/j.jmmm.2015.12.099
dc.identifier.endpage94en
dc.identifier.issn0304-8853
dc.identifier.journaltitleJournal of Magnetism and Magnetic Materialsen
dc.identifier.startpage89en
dc.identifier.urihttps://hdl.handle.net/10468/3715
dc.identifier.volume406en
dc.language.isoenen
dc.publisherElsevieren
dc.relation.projectinfo:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318529/EU/POWER SoC With Integrated PassivEs/POWERSWIPEen
dc.rights© 2015 Elsevier B.V. This manuscript version is made available under the CC-BY-NC-ND 4.0 licenseen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/en
dc.subjectFerriteen
dc.subjectMicro-fabricationen
dc.subjectMicro-Inductorsen
dc.subjectIntegrated magneticsen
dc.subjectDC–DC convertersen
dc.titleMEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substratesen
dc.typeArticle (peer-reviewed)en
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