Anodic oxidation of InP in KOH electrolytes

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dc.contributor.authorO'Dwyer, Colm
dc.contributor.authorMelly, T.
dc.contributor.authorHarvey, E.
dc.contributor.authorBuckley, D. Noel
dc.contributor.authorCunnane, V. J.
dc.contributor.authorSutton, David
dc.contributor.authorSerantoni, M.
dc.contributor.authorNewcomb, Simon B.
dc.date.accessioned2016-07-15T08:31:41Z
dc.date.available2016-07-15T08:31:41Z
dc.date.issued2002-10
dc.date.updated2012-11-30T12:15:24Z
dc.description.abstractThe anodic behavior of InP in 1 mol dm-3 KOH was investigated and compared with its behavior at higher concentrations of KOH. At concentrations of 2 mol dm-3 KOH or greater, selective etching of InP occurs leading to thick porous InP layers near the surface of the sustrate. In contrast, in 1 mol dm-3 KOH, no such porous layers are formed but a thin surface film is formed at potentials in the range 0.6 V to 1.3 V. The thickness of this film was determined by spectroscopic ellipsometry as a function of the upper potential and the measured film thickness corresponds to the charge passed up to a potential of 1.0 V. Anodization to potentials above 1.5 V in 1 mol dm- 3 KOH results in the growth of thick, porous oxide films (~ 1.2 µm). These films are observed to crack, ex-situ, due to shrinkage after drying in ambient air. Comparisons between the charge density and film thickness measurements indicate a porosity of approximately 77% for such films.en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationO’Dwyer, C., Melly, T., Harvey, E., Buckley, D. N., Cunnane, V. J., Sutton, D., Serantoni, M. and Newcomb, S. B. (2002) 'Anodic Oxidation of InP in KOH Electrolytes', State-of-the-Art Program on Compound Semiconductors XXXVII (SOTAPOCS XXXVII) / Narrow Bandgap Optoelectronic Materials and Devices, 202nd ECS Meeting, Salt Lake City, Utah, 20-24 October, in Proceedings - Electrochemical Society, Vol. 14, pp. 233-240. ISBN 1-56677-306-5.en
dc.identifier.endpage240en
dc.identifier.isbn1-56677-306-5.
dc.identifier.journaltitleProceedings - Electrochemical Societyen
dc.identifier.startpage233en
dc.identifier.urihttps://hdl.handle.net/10468/2883
dc.identifier.volume14en
dc.language.isoenen
dc.publisherElectrochemical Societyen
dc.relation.urihttp://ecsdl.org/site/misc/proceedings_volumes.xhtml
dc.rights© 2002, Electrochemical Societyen
dc.subjectTransmission electron microscopyen
dc.subjectSpectroscopic ellipsometryen
dc.subjectAnodizationen
dc.subjectPorous oxide filmsen
dc.titleAnodic oxidation of InP in KOH electrolytesen
dc.typeConference itemen
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