Magnetic multilayer fabrication technology with selective activation of SU-8 films

Simple item page
dc.contributor.authorAnthony, Rickyen
dc.contributor.authorÓ Mathúna, S. Cianen
dc.contributor.authorRohan, James F.en
dc.contributor.funderEuropean Commissionen
dc.contributor.funderSeventh Framework Programmeen
dc.date.accessioned2016-11-29T14:52:30Z
dc.date.available2016-11-29T14:52:30Z
dc.date.issued2016-11
dc.description.abstractDeveloping magnetic multilayers are essential for reducing the core eddy current losses in the integrated power magnetic components (inductors/transformers). PVD based processes are typically used to achieve the multilayers with thin dielectric spacers. However, those processes are costly, and can be difficult to integrate. It is evident that cost effective alternative is needed. In recent years, electrochemical processes have been investigated to address these issues. One such method would be to successive metallization of insulating photoresists acting as spacer layer (such as SU-8) with soft magnetic films (such as Ni-Fe-Co alloys). This paper describes an experimental procedure to fabricate magnetic multilayers with a thin variant of SU-8 2 (< 1.5 µm) as inter-layers for integrated micro-inductors/transformers for power conversion applications.en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationAnthony, R., Ó Mathúna, C. & Rohan, J. F. (2016) ‘Magnetic Multilayer Fabrication Technology with Selective Activation of SU-8 Films’, Journal of Physics: Conference Series, 757, 012031. doi: 10.1088/1742-6596/757/1/012031en
dc.identifier.doi10.1088/1742-6596/757/1/012031
dc.identifier.endpage012031-7en
dc.identifier.issn1742-6588
dc.identifier.journaltitleJournal of Physics: Conference Seriesen
dc.identifier.startpage012031-1en
dc.identifier.urihttps://hdl.handle.net/10468/3321
dc.identifier.volume757en
dc.language.isoenen
dc.publisherIOP Publishingen
dc.relation.projectinfo:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318529/EU/POWER SoC With Integrated PassivEs/POWERSWIPEen
dc.rights© 2016, The Authors. Published under licence by IOP Publishing Ltd. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.en
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/en
dc.subjectPower conversion circuitryen
dc.subjectMagnetic multilayersen
dc.subjectMicro-inductorsen
dc.subjectMicro transformersen
dc.subjectPower conversion applications.en
dc.titleMagnetic multilayer fabrication technology with selective activation of SU-8 filmsen
dc.typeArticle (peer-reviewed)en
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
1801.pdf
Size:
1.54 MB
Format:
Adobe Portable Document Format
Description:
Published Version
Download
License bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
license.txt
Size:
2.71 KB
Format:
Item-specific license agreed upon to submission
Description:
Download
Collections
Tyndall National Institute - Journal Articles
Electrical and Electronic Engineering - Journal Articles