Molecular layer deposition of "magnesicone", a magnesium-based hybrid material

dc.check.date2021-05-06
dc.check.infoAccess to this article is restricted until 12 months after publication by request of the publisher.en
dc.contributor.authorKint, Jeroen
dc.contributor.authorMattelaer, Felix
dc.contributor.authorVandenbroucke, Sofie S. T.
dc.contributor.authorMuriqi, Arbresha
dc.contributor.authorMinjauw, Matthias M.
dc.contributor.authorNisula, Mikko
dc.contributor.authorVereecken, Philippe M.
dc.contributor.authorNolan, Michael
dc.contributor.authorDendooven, Jolien
dc.contributor.authorDetavernier, Christophe
dc.contributor.funderFonds Wetenschappelijk Onderzoeken
dc.contributor.funderBijzonder Onderzoeksfonds UGenten
dc.contributor.funderHorizon 2020en
dc.date.accessioned2020-08-17T11:45:08Z
dc.date.available2020-08-17T11:45:08Z
dc.date.issued2020-05-06
dc.date.updated2020-08-17T11:27:35Z
dc.description.abstractMolecular layer deposition (MLD) offers the deposition of ultrathin and conformal organic or hybrid films which have a wide range of applications. However, some critical potential applications require a very specific set of properties. For application as desiccant layers in water barrier films, for example, the films need to exhibit water uptake and swelling and be overcoatable. For application as a backbone for a solid composite electrolyte for lithium ions on the other hand, the films need to be stable against lithium and need to be transformable from a hybrid MLD film to a porous metal oxide film. Magnesium-based MLD films, called "magnesicone", are promising on both these aspects, and thus, an MLD process is developed using Mg(MeCp)(2) as a metal source and ethylene glycol (EG) or glycerol (GL) as organic reactants. Saturated growth could be achieved at 2 to 3 angstrom/cycle in a wide temperature window from 100 to 250 degrees C. The resulting magnesicone films react with ambient air and exhibit water uptake, which is in the case of the GL-based films associated with swelling (up to 10%) and in the case of EG-based magnesicone with Mg(CO)(3) formation, and are overcoatable with an ALD of Al2O3. Furthermore, by carefully tuning the annealing rate, the EG-grown films can be made porous at 350 degrees C. Hence, these functional tests demonstrate the potential of magnesicone films as reactive barrier layers and as the porous backbone of lithium ion composite solid electrolytes, making it a promising material for future applications.en
dc.description.sponsorshipFonds Wetenschappelijk Onderzoek (Doctoral Grant; Postdoctoral Fellowships); Bijzonder Onderzoeksfonds UGent (GOA project 01G01019)en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationKint, J., Mattelaer, F., Vandenbroucke, S. S. T., Muriqi, A., Minjauw, M. M., Nisula, M., Vereecken, P. M., Nolan, M., Dendooven, J. and Detavernier, C. (2020) 'Molecular layer deposition of magnesicone, a magnesium-based hybrid material', Chemistry of Materials, 32(11), pp. 4451-4466. doi: 10.1021/acs.chemmater.9b05116en
dc.identifier.doi10.1021/acs.chemmater.9b05116en
dc.identifier.eissn1520-5002
dc.identifier.endpage4466en
dc.identifier.issn0897-4756
dc.identifier.issued11en
dc.identifier.journaltitleChemistry of Materialsen
dc.identifier.startpage4451en
dc.identifier.urihttps://hdl.handle.net/10468/10403
dc.identifier.volume32en
dc.language.isoenen
dc.publisherAmerican Chemical Societyen
dc.relation.projectinfo:eu-repo/grantAgreement/EC/H2020::MSCA-ITN-ETN/765378/EU/A European Training Network for Functional Hybrid Coatings by Molecular Layer Deposition/HYCOATen
dc.rights© 2020, American Chemical Society. This document is the Accepted Manuscript version of a Published Work that appeared in final form in Chemistry of Materials after technical editing by the publisher. To access the final edited and published work see https://pubs.acs.org/doi/abs/10.1021/acs.chemmater.9b05116en
dc.subjectElectrochemical energy storageen
dc.subjectThin filmsen
dc.subjectHigh performanceen
dc.subjectBarrier filmsen
dc.subjectGrowthen
dc.subjectOxideen
dc.subjectLien
dc.subjectTrimethylaluminumen
dc.subjectTitaniconeen
dc.subjectProtectionen
dc.titleMolecular layer deposition of "magnesicone", a magnesium-based hybrid materialen
dc.typeArticle (peer-reviewed)en
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