Block copolymer self-assembly based device structures

Rasappa, Sozaraj

Block copolymer self-assembly based device structures

dc.check.embargoformat	Not applicable	en
dc.check.info	No embargo required	en
dc.check.opt-out	Not applicable	en
dc.check.reason	No embargo required	en
dc.check.type	No Embargo Required
dc.contributor.advisor	Morris, Michael A.	en
dc.contributor.author	Rasappa, Sozaraj
dc.contributor.funder	Science Foundation Ireland	en
dc.date.accessioned	2013-09-25T16:30:15Z
dc.date.available	2013-09-25T16:30:15Z
dc.date.issued	2013
dc.date.submitted	2013
dc.description.abstract	This thesis investigated the block copolymer (BCP) thin film characteristics and pattern formation using a set of predetermined molecular weights of PS-b-PMMA and PS-b-PDMS. Post BCP pattern fabrication on the required base substrate a dry plasma etch process was utilised for successful pattern transfer of the BCP resist onto underlying substrate. The resultant sub-10 nm device features were used in front end of line (FEoL) fabrication of active device components in integrated circuits (IC). The potential use of BCP templates were further extended to metal and metal-oxide nanowire fabrication. These nanowires were further investigated in real-time applications as novel sensors and supercapacitors.	en
dc.description.status	Not peer reviewed	en
dc.description.version	Accepted Version
dc.format.mimetype	application/pdf	en
dc.identifier.citation	Rasappa, S. 2013. Block copolymer self-assembly based device structures. PhD Thesis, University College Cork.	en
dc.identifier.endpage	132
dc.identifier.uri	https://hdl.handle.net/10468/1237
dc.language.iso	en	en
dc.publisher	University College Cork	en
dc.rights	© 2013, Sozaraj Rasappa.	en
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/	en
dc.subject	Block copolymer self-assembly	en
dc.subject	Sensors	en
dc.subject	Sub-10nm device fabrication	en
dc.subject.lcsh	Block copolymers	en
dc.subject.lcsh	Plasma etching	en
dc.subject.lcsh	Nanowires	en
dc.subject.lcsh	Supercapacitors	en
dc.thesis.opt-out	false	*
dc.title	Block copolymer self-assembly based device structures	en
dc.type	Doctoral thesis	en
dc.type.qualificationlevel	Doctoral	en
dc.type.qualificationname	PhD (Science)	en
ucc.workflow.supervisor	m.morris@ucc.ie	*