Low-loss micro-resonator filters fabricated in silicon by CMOS-compatible lithographic techniques: design and characterization
| dc.contributor.author | Carroll, Lee | |
| dc.contributor.funder | European Commission | en |
| dc.contributor.funder | Seventh Framework Programme | en |
| dc.date.accessioned | 2017-02-16T16:02:49Z | |
| dc.date.available | 2017-02-16T16:02:49Z | |
| dc.date.issued | 2017-02-11 | |
| dc.description.abstract | Optical resonators are fundamental building-blocks for the development of Si-photonics-integrated circuits, as tunable on-chip optical filters. In addition to the specific spectral shape, which may vary according to a particular application, extremely low losses from these devices are a crucial requirement. In the current state-of-the-art devices, most low-loss filters have only been demonstrated by exploiting ad hoc lithographic and etching techniques, which are not compatible with the standard CMOS (complementary metal-oxide semiconductor) process-flow available at Si-photonic foundries. In this paper, we describe the design and optimization of optical micro-resonators, based on Si-waveguides with a height lower than the standard ones (i.e., less than 220 nm), prepared on SOI (silicon on insulator) platform, which allow the realization of high-performance optical filters with an insertion loss lower than 1 dB, using only previously validated lithographic etch-depths. | en |
| dc.description.status | Peer reviewed | en |
| dc.description.version | Published Version | en |
| dc.format.mimetype | application/pdf | en |
| dc.identifier.citation | Marchetti, R., Vitali, V., Lacava, C., Cristiani, I., Giuliani, G., Muffato, V., Fournier, M., Abrate, S., Gaudino, R., Temporiti, E., Carroll, L. and Minzioni, P. (2017) 'Low-Loss Micro-Resonator Filters Fabricated in Silicon by CMOS-Compatible Lithographic Techniques: Design and Characterization', Applied Sciences, 7(2), pp. 174. doi:10.3390/app7020174 | en |
| dc.identifier.doi | 10.3390/app7020174 | |
| dc.identifier.endpage | 174-11 | en |
| dc.identifier.issn | 2076-3417 | |
| dc.identifier.issued | 2 | en |
| dc.identifier.journaltitle | Applied Sciences | en |
| dc.identifier.startpage | 174-1 | en |
| dc.identifier.uri | https://hdl.handle.net/10468/3648 | |
| dc.identifier.volume | 7 | en |
| dc.language.iso | en | en |
| dc.publisher | MDPI | en |
| dc.relation.project | info:eu-repo/grantAgreement/EC/FP7::SP1::ICT/318704/EU/FDMA Access By Using Low-cost Optical Network Units in Silicon Photonics/FABULOUS | en |
| dc.rights | © 2017 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). | en |
| dc.rights.uri | http://creativecommons.org/licenses/by/4.0/ | en |
| dc.subject | Silicon photonics | en |
| dc.subject | Micro-rings | en |
| dc.subject | Integrated filters | en |
| dc.subject | Optical losses | en |
| dc.subject | Optical components | en |
| dc.subject | Integrated waveguides | en |
| dc.title | Low-loss micro-resonator filters fabricated in silicon by CMOS-compatible lithographic techniques: design and characterization | en |
| dc.type | Article (peer-reviewed) | en |
