Fabrication of three-dimensional substrates for Li microbatteries on Si

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dc.contributor.author Jeyaseelan, Arockia Vimal
dc.contributor.author Rohan, James F.
dc.date.accessioned 2014-02-17T14:21:13Z
dc.date.available 2014-02-17T14:21:13Z
dc.date.issued 2009-11-15
dc.identifier.citation JEYASEELAN, A. V. & ROHAN, J. F. 2009. Fabrication of three-dimensional substrates for Li microbatteries on Si. Applied Surface Science, 256, S61-S64. doi: http://dx.doi.org/10.1016/j.apsusc.2009.04.190 en
dc.identifier.volume 256 en
dc.identifier.issued 3, Supplement en
dc.identifier.startpage S61 en
dc.identifier.endpage S64 en
dc.identifier.uri http://hdl.handle.net/10468/1388
dc.identifier.doi 10.1016/j.apsusc.2009.04.190
dc.description.abstract Lithographic techniques for patterning planar substrates to achieve microbattery materials compatible three-dimensional (3D) Ni substrates for sequential deposition of active battery materials are described. A single spin negative photoresist is used to achieve 100 mu m pattern heights. After patterning, Ni is electroplated on the substrates from a low stress Ni sulphamate bath to a maximum of 100 mu m. The sidewall angle achieved yields a thinner Ni feature at the surface level than at the base which is a key parameter to facilitate subsequent active battery materials deposition by vacuum deposition techniques. An aspect ratio of 1.5:1 has been achieved and the surface area is increased by comparison with planar electrodes. en
dc.description.sponsorship European Commission (FP6 NAPOLYDE NMP2-CT-2005-515846) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher Elsevier en
dc.relation.uri http://www.sciencedirect.com/science/article/pii/S0169433209005868
dc.rights Copyright © 2009 Elsevier Inc. All rights reserved. NOTICE: this is the author’s version of a work that was accepted for publication in Applied Surface Science. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Applied Surface Science [Volume 256, Issue 3, Supplement, 15 November 2009, Pages S61–S64] http://dx.doi.org/10.1016/j.apsusc.2009.04.190 en
dc.subject Microfabrication en
dc.subject 3D en
dc.subject Microbattery en
dc.subject Anode en
dc.subject Silicon en
dc.subject Lithium en
dc.subject Thin en
dc.subject Films en
dc.title Fabrication of three-dimensional substrates for Li microbatteries on Si en
dc.type Article (peer-reviewed) en
dc.internal.authorurl http://www.tyndall.ie en
dc.internal.authorcontactother James Rohan, Tyndall Microsystems, University College Cork, Cork, Ireland. +353-21-490-3000 Email: james.rohan@tyndall.ie en
dc.internal.availability Full text available en
dc.date.updated 2013-12-18T17:05:20Z
dc.description.version Accepted Version en
dc.internal.rssid 43334634
dc.internal.wokid 000272030200014
dc.contributor.funder European Commission en
dc.contributor.funder Sixth Framework Programme
dc.description.status Peer reviewed en
dc.identifier.journaltitle Applied Surface Science en
dc.internal.copyrightchecked No !!CORA!! Romeo - AV + set statement permitted. en
dc.internal.licenseacceptance Yes en
dc.internal.IRISemailaddress james.rohan@tyndall.ie en


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