Citation:DEY, G. & ELLIOT, S. D. 2014. Copper reduction and atomic layer deposition by oxidative decomposition of formate by hydrazine. RSC Advances. 4, 34448-34453. http://dx.doi.org/10.1039/C4RA07003H
We have used density functional theory (DFT) to study the mechanism of three step atomic layer deposition (ALD) of copper via formate and hydrazine. The technique holds promise for deposition of other transition metals.
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