Copper reduction and atomic layer deposition by oxidative decomposition of formate by hydrazine

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Copper reduction and atomic layer deposition by oxidative decomposition of formate by hydrazine

Dey, Gangotri; Elliott, Simon D.
Date: 2014
Copyright: © The Royal Society of Chemistry 2014. Reproduced by permission of The Royal Society of Chemistry.
Citation: DEY, G. & ELLIOT, S. D. 2014. Copper reduction and atomic layer deposition by oxidative decomposition of formate by hydrazine. RSC Advances. 4, 34448-34453. http://dx.doi.org/10.1039/C4RA07003H
Published Version: 10.1039/C4RA07003H

Abstract:

We have used density functional theory (DFT) to study the mechanism of three step atomic layer deposition (ALD) of copper via formate and hydrazine. The technique holds promise for deposition of other transition metals.

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