Insertion of metal oxides into block copolymer nanopatterns as robust etch masks for nanolithography

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dc.contributor.advisor Morris, Michael A. en
dc.contributor.advisor Holmes, Justin D. en Cummins, Cian 2015-12-09T10:49:07Z 2015 2015
dc.identifier.citation Cummins, C. A. 2015. Insertion of metal oxides into block copolymer nanopatterns as robust etch masks for nanolithography. PhD Thesis, University College Cork. en
dc.identifier.endpage 267
dc.description.abstract Directed self-assembly (DSA) of block copolymers (BCPs) is a prime candidate to further extend dimensional scaling of silicon integrated circuit features for the nanoelectronic industry. Top-down optical techniques employed for photoresist patterning are predicted to reach an endpoint due to diffraction limits. Additionally, the prohibitive costs for “fabs” and high volume manufacturing tools are issues that have led the search for alternative complementary patterning processes. This thesis reports the fabrication of semiconductor features from nanoscale on-chip etch masks using “high χ” BCP materials. Fabrication of silicon and germanium nanofins via metal-oxide enhanced BCP on-chip etch masks that might be of importance for future Fin-field effect transistor (FinFETs) application are detailed. en
dc.description.sponsorship Science Foundation Ireland (SFI Grant 09/IN.1/602) en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher University College Cork en
dc.rights © 2015, Cian A. Cummins en
dc.rights.uri en
dc.subject Nanotechnology en
dc.subject Materials science en
dc.subject Metal oxides en
dc.subject Block copolymers en
dc.subject Polymers en
dc.subject Nanolithography en
dc.subject Silicon en
dc.subject Semiconductors en
dc.subject Nanopatterns en
dc.title Insertion of metal oxides into block copolymer nanopatterns as robust etch masks for nanolithography en
dc.type Doctoral thesis en
dc.type.qualificationlevel Doctoral en
dc.type.qualificationname PhD (Science) en
dc.internal.availability Full text available en
dc.description.version Accepted Version
dc.contributor.funder Science Foundation Ireland en
dc.description.status Not peer reviewed en Chemistry en
dc.check.reason This thesis is due for publication or the author is actively seeking to publish this material en
dc.check.opt-out No en
dc.thesis.opt-out false
dc.check.chapterOfThesis Chapter 1; Chapter 3
dc.check.embargoformat E-thesis on CORA only en
dc.internal.conferring Autumn Conferring 2015

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© 2015, Cian A. Cummins Except where otherwise noted, this item's license is described as © 2015, Cian A. Cummins
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